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- W1974804002 abstract "Lithographers are preparing their processes for the 130nm node. About one year ago, first generation full field ArF step and scan systems have been introduced in a number of fabs. These systems have lenses with numerical apertures in the order of 0.6. At the same time, 0.7 NA KrF step and scan systems have been introduced as well. Also last year, KrF resists were shown to be much more mature than ArF resists." @default.
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- W1974804002 date "2000-07-05" @default.
- W1974804002 modified "2023-10-03" @default.
- W1974804002 title "Status of ArF lithography for the 130-nm technology node" @default.
- W1974804002 doi "https://doi.org/10.1117/12.389029" @default.
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