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- W1974810801 abstract "Abstract The fundamental steps in creating glow discharges of Ar and TMS are completely different. While the glow discharge of Ar is the physical transformation of Ar atoms caused by ionization, the glow discharge of TMS is the chemical transformation of molecules that yields hydrogen atoms and variety of chemically reactive species, mostly free radicals (species with an un‐paired electron), caused by the low‐energy electron‐impact dissociation. The distribution of electron temperature and electron density in the broken‐down gas phase of Ar is re‐examined in light of the breakdown process, and the concept of the reference energy state of the luminous gas phase is presented. magnified image" @default.
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- W1974810801 date "2007-05-22" @default.
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- W1974810801 title "Electrical Breakdown of Argon and Trimethylsilane in Low-Pressure DC Discharges: The Surface-States Equilibration Principle" @default.
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- W1974810801 doi "https://doi.org/10.1002/ppap.200600160" @default.
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