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• W1974850834 endingPage "58" @default.
• W1974850834 startingPage "53" @default.
• W1974850834 abstract "We demonstrate the high-speed growth of β-Ga2O3 quasi-heteroepilayers on off-angled sapphire (0 0 0 1) substrates by halide vapor phase epitaxy (HVPE). (2¯01) oriented β-Ga2O3 layers were successfully grown using GaCl and O2 as source gases. The growth rate monotonically increased with increasing the partial pressures of the source gases, reaching over 250 μm/h. This rate is over two orders of magnitude larger than those of conventional vapor phase epitaxial growth techniques such as molecular beam epitaxy or metalorganic vapor phase epitaxy. X-ray pole figure measurements indicated the presence of six in-plane rotational domains, in accordance with the substrate symmetry, plus some minor (3 1 0) domains. By the use of off-angled substrates and thick layer overgrowth, one of the in-plane orientations was strongly favored and the (3 1 0) residuals effectively suppressed, so that quasi-heteroepitaxial growth was achieved. Therefore, these results indicate the high-potential of the HVPE technique for the growth of thick and thin β-Ga2O3 layers for the cost-effective production of β-Ga2O3 based devices." @default.
• W1974850834 created "2016-06-24" @default.
• W1974850834 creator A5050777762 @default.
• W1974850834 creator A5052933734 @default.
• W1974850834 creator A5059312872 @default.
• W1974850834 date "2015-01-01" @default.
• W1974850834 modified "2023-10-16" @default.
• W1974850834 title "Quasi-heteroepitaxial growth of β-Ga2O3 on off-angled sapphire (0 0 0 1) substrates by halide vapor phase epitaxy" @default.
• W1974850834 cites W126586751 @default.
• W1974850834 cites W1492977420 @default.
• W1974850834 cites W1543801112 @default.
• W1974850834 cites W1969186091 @default.
• W1974850834 cites W1976100621 @default.
• W1974850834 cites W1977400064 @default.
• W1974850834 cites W1982424358 @default.
• W1974850834 cites W1988564875 @default.
• W1974850834 cites W1990807725 @default.
• W1974850834 cites W1993521697 @default.
• W1974850834 cites W2013095619 @default.
• W1974850834 cites W2019468267 @default.
• W1974850834 cites W2020431932 @default.
• W1974850834 cites W2027101237 @default.
• W1974850834 cites W2070759111 @default.
• W1974850834 cites W2070837727 @default.
• W1974850834 cites W2070946896 @default.
• W1974850834 cites W2074536946 @default.
• W1974850834 cites W2091819156 @default.
• W1974850834 doi "https://doi.org/10.1016/j.jcrysgro.2014.10.038" @default.
• W1974850834 hasPublicationYear "2015" @default.
• W1974850834 type Work @default.
• W1974850834 sameAs 1974850834 @default.
• W1974850834 citedByCount "82" @default.
• W1974850834 countsByYear W19748508342015 @default.
• W1974850834 countsByYear W19748508342016 @default.
• W1974850834 countsByYear W19748508342017 @default.
• W1974850834 countsByYear W19748508342018 @default.
• W1974850834 countsByYear W19748508342019 @default.
• W1974850834 countsByYear W19748508342020 @default.
• W1974850834 countsByYear W19748508342021 @default.
• W1974850834 countsByYear W19748508342022 @default.
• W1974850834 countsByYear W19748508342023 @default.
• W1974850834 crossrefType "journal-article" @default.
• W1974850834 hasAuthorship W1974850834A5050777762 @default.
• W1974850834 hasAuthorship W1974850834A5052933734 @default.
• W1974850834 hasAuthorship W1974850834A5059312872 @default.
• W1974850834 hasConcept C110738630 @default.
• W1974850834 hasConcept C111368507 @default.
• W1974850834 hasConcept C113196181 @default.
• W1974850834 hasConcept C120665830 @default.
• W1974850834 hasConcept C121332964 @default.
• W1974850834 hasConcept C127313418 @default.
• W1974850834 hasConcept C171250308 @default.
• W1974850834 hasConcept C171560689 @default.
• W1974850834 hasConcept C178790620 @default.
• W1974850834 hasConcept C179104552 @default.
• W1974850834 hasConcept C185592680 @default.
• W1974850834 hasConcept C19067145 @default.
• W1974850834 hasConcept C192562407 @default.
• W1974850834 hasConcept C2524010 @default.
• W1974850834 hasConcept C2777289219 @default.
• W1974850834 hasConcept C2778312390 @default.
• W1974850834 hasConcept C2779227376 @default.
• W1974850834 hasConcept C2780064504 @default.
• W1974850834 hasConcept C3018640491 @default.
• W1974850834 hasConcept C33923547 @default.
• W1974850834 hasConcept C3792809 @default.
• W1974850834 hasConcept C43617362 @default.
• W1974850834 hasConcept C44280652 @default.
• W1974850834 hasConcept C49040817 @default.
• W1974850834 hasConcept C520434653 @default.
• W1974850834 hasConcept C57410435 @default.
• W1974850834 hasConcept C8010536 @default.
• W1974850834 hasConcept C97355855 @default.
• W1974850834 hasConceptScore W1974850834C110738630 @default.
• W1974850834 hasConceptScore W1974850834C111368507 @default.
• W1974850834 hasConceptScore W1974850834C113196181 @default.
• W1974850834 hasConceptScore W1974850834C120665830 @default.
• W1974850834 hasConceptScore W1974850834C121332964 @default.
• W1974850834 hasConceptScore W1974850834C127313418 @default.
• W1974850834 hasConceptScore W1974850834C171250308 @default.
• W1974850834 hasConceptScore W1974850834C171560689 @default.
• W1974850834 hasConceptScore W1974850834C178790620 @default.
• W1974850834 hasConceptScore W1974850834C179104552 @default.
• W1974850834 hasConceptScore W1974850834C185592680 @default.
• W1974850834 hasConceptScore W1974850834C19067145 @default.
• W1974850834 hasConceptScore W1974850834C192562407 @default.
• W1974850834 hasConceptScore W1974850834C2524010 @default.
• W1974850834 hasConceptScore W1974850834C2777289219 @default.
• W1974850834 hasConceptScore W1974850834C2778312390 @default.
• W1974850834 hasConceptScore W1974850834C2779227376 @default.
• W1974850834 hasConceptScore W1974850834C2780064504 @default.
• W1974850834 hasConceptScore W1974850834C3018640491 @default.
• W1974850834 hasConceptScore W1974850834C33923547 @default.
• W1974850834 hasConceptScore W1974850834C3792809 @default.
• W1974850834 hasConceptScore W1974850834C43617362 @default.
• W1974850834 hasConceptScore W1974850834C44280652 @default.
• W1974850834 hasConceptScore W1974850834C49040817 @default.
• W1974850834 hasConceptScore W1974850834C520434653 @default.

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