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• W1974859451 abstract "Abstract The formation, migration and agglomeration in silicon of fluorine-vacancy complexes have been monitored by single-detector Doppler broadening spectroscopy. After electronics engineers found that fluorine ion implantation effectively eliminated the transient-enhanced diffusion of dopants in the creation of ultra-shallow junctions, a vital step in the further miniaturization of device structures, positron beams have played a pivotal role in providing an insight into the mechanisms underlying this phenomenon, being able to detect FV complexes in implanted and annealed samples. Secondary Ion Mass Spectrometry has provided complementary information on fluorine concentrations so that the nature of the FmVn complexes can be further assessed. New results on Si and SiGe structures are presented." @default.
• W1974859451 created "2016-06-24" @default.
• W1974859451 creator A5064039689 @default.
• W1974859451 creator A5073158564 @default.
• W1974859451 date "2008-10-01" @default.
• W1974859451 modified "2023-09-26" @default.
• W1974859451 title "Useful vacancies: Positron beam interrogation of fluorine-vacancy complexes in semiconductor device structures" @default.
• W1974859451 cites W1503827802 @default.
• W1974859451 cites W1577528903 @default.
• W1974859451 cites W1967159811 @default.
• W1974859451 cites W1998302390 @default.
• W1974859451 cites W2000682316 @default.
• W1974859451 cites W2005616648 @default.
• W1974859451 cites W2006873669 @default.
• W1974859451 cites W2012217147 @default.
• W1974859451 cites W2012799032 @default.
• W1974859451 cites W2019596327 @default.
• W1974859451 cites W2019917654 @default.
• W1974859451 cites W2076353731 @default.
• W1974859451 cites W2084147203 @default.
• W1974859451 cites W2095105290 @default.
• W1974859451 cites W2476220872 @default.
• W1974859451 cites W2521888075 @default.
• W1974859451 doi "https://doi.org/10.1016/j.apsusc.2008.05.168" @default.
• W1974859451 hasPublicationYear "2008" @default.
• W1974859451 type Work @default.
• W1974859451 sameAs 1974859451 @default.
• W1974859451 citedByCount "1" @default.
• W1974859451 countsByYear W19748594512019 @default.
• W1974859451 crossrefType "journal-article" @default.
• W1974859451 hasAuthorship W1974859451A5064039689 @default.
• W1974859451 hasAuthorship W1974859451A5073158564 @default.
• W1974859451 hasConcept C108225325 @default.
• W1974859451 hasConcept C113196181 @default.
• W1974859451 hasConcept C114221277 @default.
• W1974859451 hasConcept C121332964 @default.
• W1974859451 hasConcept C1276947 @default.
• W1974859451 hasConcept C145148216 @default.
• W1974859451 hasConcept C147120987 @default.
• W1974859451 hasConcept C171250308 @default.
• W1974859451 hasConcept C178790620 @default.
• W1974859451 hasConcept C185544564 @default.
• W1974859451 hasConcept C185592680 @default.
• W1974859451 hasConcept C191897082 @default.
• W1974859451 hasConcept C191952053 @default.
• W1974859451 hasConcept C192562407 @default.
• W1974859451 hasConcept C202100949 @default.
• W1974859451 hasConcept C41823505 @default.
• W1974859451 hasConcept C4839761 @default.
• W1974859451 hasConcept C49040817 @default.
• W1974859451 hasConcept C506198293 @default.
• W1974859451 hasConcept C544956773 @default.
• W1974859451 hasConcept C57528182 @default.
• W1974859451 hasConcept C57863236 @default.
• W1974859451 hasConcept C62103226 @default.
• W1974859451 hasConcept C8010536 @default.
• W1974859451 hasConceptScore W1974859451C108225325 @default.
• W1974859451 hasConceptScore W1974859451C113196181 @default.
• W1974859451 hasConceptScore W1974859451C114221277 @default.
• W1974859451 hasConceptScore W1974859451C121332964 @default.
• W1974859451 hasConceptScore W1974859451C1276947 @default.
• W1974859451 hasConceptScore W1974859451C145148216 @default.
• W1974859451 hasConceptScore W1974859451C147120987 @default.
• W1974859451 hasConceptScore W1974859451C171250308 @default.
• W1974859451 hasConceptScore W1974859451C178790620 @default.
• W1974859451 hasConceptScore W1974859451C185544564 @default.
• W1974859451 hasConceptScore W1974859451C185592680 @default.
• W1974859451 hasConceptScore W1974859451C191897082 @default.
• W1974859451 hasConceptScore W1974859451C191952053 @default.
• W1974859451 hasConceptScore W1974859451C192562407 @default.
• W1974859451 hasConceptScore W1974859451C202100949 @default.
• W1974859451 hasConceptScore W1974859451C41823505 @default.
• W1974859451 hasConceptScore W1974859451C4839761 @default.
• W1974859451 hasConceptScore W1974859451C49040817 @default.
• W1974859451 hasConceptScore W1974859451C506198293 @default.
• W1974859451 hasConceptScore W1974859451C544956773 @default.
• W1974859451 hasConceptScore W1974859451C57528182 @default.
• W1974859451 hasConceptScore W1974859451C57863236 @default.
• W1974859451 hasConceptScore W1974859451C62103226 @default.
• W1974859451 hasConceptScore W1974859451C8010536 @default.
• W1974859451 hasLocation W19748594511 @default.
• W1974859451 hasOpenAccess W1974859451 @default.
• W1974859451 hasPrimaryLocation W19748594511 @default.
• W1974859451 hasRelatedWork W1964289942 @default.
• W1974859451 hasRelatedWork W1974176950 @default.
• W1974859451 hasRelatedWork W1987399941 @default.
• W1974859451 hasRelatedWork W1989438105 @default.
• W1974859451 hasRelatedWork W1990115992 @default.
• W1974859451 hasRelatedWork W2008034359 @default.
• W1974859451 hasRelatedWork W2015749158 @default.
• W1974859451 hasRelatedWork W2019596327 @default.
• W1974859451 hasRelatedWork W2029944903 @default.
• W1974859451 hasRelatedWork W2031008389 @default.
• W1974859451 hasRelatedWork W2031539462 @default.
• W1974859451 hasRelatedWork W2041499631 @default.
• W1974859451 hasRelatedWork W2045537317 @default.
• W1974859451 hasRelatedWork W2051250154 @default.
• W1974859451 hasRelatedWork W2051348112 @default.
• W1974859451 hasRelatedWork W2095238364 @default.
• W1974859451 hasRelatedWork W2109998045 @default.

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