Matches in SemOpenAlex for { <https://semopenalex.org/work/W1974882904> ?p ?o ?g. }
Showing items 1 to 69 of
69
with 100 items per page.
- W1974882904 endingPage "148" @default.
- W1974882904 startingPage "143" @default.
- W1974882904 abstract "Investigation of the surface state of plasma-induced fluorine damage in pseudomorphic high electron mobility transistors (P-HEMTs) using x-ray photoemission spectroscopy (XPS) revealed that the 1s core-level spectrum of fluorine faded out after lengthy x-ray exposure. The x-ray emission apparently caused fluorine desorption from the plasma-damaged P-HEMTs. We thus investigated whether x-ray emission enables P-HEMTs to recover from plasma-induced fluorine damage. The carrier density and electron mobility of P-HEMTs without thermal annealing improved by 63 and 34% with x-ray exposure, while P-HEMTs with thermal annealing improved by 18 and 17%. A secondary ion mass spectrometry (SIMS) profile of fluorine in P-HEMTs with x-ray exposure without thermal annealing showed a reduction in the amount of fluorine in the δ-doped layer and the channel layer, while the profile in P-HEMTs with thermal annealing showed fluorine reduction only below 40nm. Thus, x-ray photoemission is effective in enabling non-thermally annealed P-HEMTs to recover from plasma-induced fluorine damage but not for thermally annealed P-HEMTs." @default.
- W1974882904 created "2016-06-24" @default.
- W1974882904 creator A5032374673 @default.
- W1974882904 creator A5043056003 @default.
- W1974882904 creator A5045055998 @default.
- W1974882904 date "2005-01-01" @default.
- W1974882904 modified "2023-10-17" @default.
- W1974882904 title "Reduction of plasma-induced fluorine damage to P-HEMTs using x-ray emission" @default.
- W1974882904 cites W2037179325 @default.
- W1974882904 cites W2078919195 @default.
- W1974882904 doi "https://doi.org/10.1587/elex.2.143" @default.
- W1974882904 hasPublicationYear "2005" @default.
- W1974882904 type Work @default.
- W1974882904 sameAs 1974882904 @default.
- W1974882904 citedByCount "1" @default.
- W1974882904 crossrefType "journal-article" @default.
- W1974882904 hasAuthorship W1974882904A5032374673 @default.
- W1974882904 hasAuthorship W1974882904A5043056003 @default.
- W1974882904 hasAuthorship W1974882904A5045055998 @default.
- W1974882904 hasBestOaLocation W19748829041 @default.
- W1974882904 hasConcept C113196181 @default.
- W1974882904 hasConcept C121332964 @default.
- W1974882904 hasConcept C127413603 @default.
- W1974882904 hasConcept C175708663 @default.
- W1974882904 hasConcept C185592680 @default.
- W1974882904 hasConcept C191897082 @default.
- W1974882904 hasConcept C192562407 @default.
- W1974882904 hasConcept C2777855556 @default.
- W1974882904 hasConcept C42360764 @default.
- W1974882904 hasConcept C43617362 @default.
- W1974882904 hasConcept C49040817 @default.
- W1974882904 hasConcept C506198293 @default.
- W1974882904 hasConcept C62520636 @default.
- W1974882904 hasConcept C82706917 @default.
- W1974882904 hasConceptScore W1974882904C113196181 @default.
- W1974882904 hasConceptScore W1974882904C121332964 @default.
- W1974882904 hasConceptScore W1974882904C127413603 @default.
- W1974882904 hasConceptScore W1974882904C175708663 @default.
- W1974882904 hasConceptScore W1974882904C185592680 @default.
- W1974882904 hasConceptScore W1974882904C191897082 @default.
- W1974882904 hasConceptScore W1974882904C192562407 @default.
- W1974882904 hasConceptScore W1974882904C2777855556 @default.
- W1974882904 hasConceptScore W1974882904C42360764 @default.
- W1974882904 hasConceptScore W1974882904C43617362 @default.
- W1974882904 hasConceptScore W1974882904C49040817 @default.
- W1974882904 hasConceptScore W1974882904C506198293 @default.
- W1974882904 hasConceptScore W1974882904C62520636 @default.
- W1974882904 hasConceptScore W1974882904C82706917 @default.
- W1974882904 hasIssue "5" @default.
- W1974882904 hasLocation W19748829041 @default.
- W1974882904 hasOpenAccess W1974882904 @default.
- W1974882904 hasPrimaryLocation W19748829041 @default.
- W1974882904 hasRelatedWork W1673448707 @default.
- W1974882904 hasRelatedWork W1982933493 @default.
- W1974882904 hasRelatedWork W2038267437 @default.
- W1974882904 hasRelatedWork W2066420453 @default.
- W1974882904 hasRelatedWork W2071047026 @default.
- W1974882904 hasRelatedWork W2075766774 @default.
- W1974882904 hasRelatedWork W2080764150 @default.
- W1974882904 hasRelatedWork W2082671129 @default.
- W1974882904 hasRelatedWork W2114818704 @default.
- W1974882904 hasRelatedWork W4205510562 @default.
- W1974882904 hasVolume "2" @default.
- W1974882904 isParatext "false" @default.
- W1974882904 isRetracted "false" @default.
- W1974882904 magId "1974882904" @default.
- W1974882904 workType "article" @default.