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- W1975089129 abstract "To maintain high stability and production yield of production equipment in a semiconductor fab, on-line quality monitoring of wafers is required. In current practice, physical metrology is performed only on monitor wafers that are periodically added in production equipment for processing with production wafers. In addition to control wafers usage and loss of tool availability, however, routine monitoring does result in a huge cost of manual operation loading. This is equivalent to about 15% loss of people productivity. To give consideration to quality control and people productivity improvement, the system of Cloud Monitor (CM) is proposed based on stepwise regression and principle component analysis (PCA). The CM is verified by test-runs on the chemical vapor deposition (CVD) and chemical mechanical polishing (CMP) processes. Eight monitor items are considered. The CM is effective to construct forecast models with 1.34% mean absolute prediction errors (MAPE) and 100% OOC catch rate (OCR). The experimental results indicate that the CM is capable of predicting quality of production wafers using real-time sensor data from production equipment. Its performance abnormality or drift can be detected timely as well as improving people productivity." @default.
- W1975089129 created "2016-06-24" @default.
- W1975089129 creator A5045815239 @default.
- W1975089129 creator A5074993350 @default.
- W1975089129 creator A5088745625 @default.
- W1975089129 date "2014-05-01" @default.
- W1975089129 modified "2023-09-27" @default.
- W1975089129 title "People productivity improvement via cloud machine monitor" @default.
- W1975089129 cites W2090866489 @default.
- W1975089129 cites W2104018023 @default.
- W1975089129 cites W2106092280 @default.
- W1975089129 cites W2106485576 @default.
- W1975089129 cites W2115540908 @default.
- W1975089129 cites W2144455593 @default.
- W1975089129 cites W2147973445 @default.
- W1975089129 cites W2158978529 @default.
- W1975089129 cites W2162251039 @default.
- W1975089129 cites W2168143294 @default.
- W1975089129 cites W2541070902 @default.
- W1975089129 doi "https://doi.org/10.1109/asmc.2014.6846998" @default.
- W1975089129 hasPublicationYear "2014" @default.
- W1975089129 type Work @default.
- W1975089129 sameAs 1975089129 @default.
- W1975089129 citedByCount "0" @default.
- W1975089129 crossrefType "proceedings-article" @default.
- W1975089129 hasAuthorship W1975089129A5045815239 @default.
- W1975089129 hasAuthorship W1975089129A5074993350 @default.
- W1975089129 hasAuthorship W1975089129A5088745625 @default.
- W1975089129 hasConcept C105795698 @default.
- W1975089129 hasConcept C119599485 @default.
- W1975089129 hasConcept C127413603 @default.
- W1975089129 hasConcept C139719470 @default.
- W1975089129 hasConcept C160671074 @default.
- W1975089129 hasConcept C162324750 @default.
- W1975089129 hasConcept C171146098 @default.
- W1975089129 hasConcept C195766429 @default.
- W1975089129 hasConcept C200601418 @default.
- W1975089129 hasConcept C204983608 @default.
- W1975089129 hasConcept C21880701 @default.
- W1975089129 hasConcept C2778348673 @default.
- W1975089129 hasConcept C33923547 @default.
- W1975089129 hasConcept C39432304 @default.
- W1975089129 hasConcept C41008148 @default.
- W1975089129 hasConcept C66018809 @default.
- W1975089129 hasConcept C78519656 @default.
- W1975089129 hasConcept C79403827 @default.
- W1975089129 hasConcept C99862985 @default.
- W1975089129 hasConceptScore W1975089129C105795698 @default.
- W1975089129 hasConceptScore W1975089129C119599485 @default.
- W1975089129 hasConceptScore W1975089129C127413603 @default.
- W1975089129 hasConceptScore W1975089129C139719470 @default.
- W1975089129 hasConceptScore W1975089129C160671074 @default.
- W1975089129 hasConceptScore W1975089129C162324750 @default.
- W1975089129 hasConceptScore W1975089129C171146098 @default.
- W1975089129 hasConceptScore W1975089129C195766429 @default.
- W1975089129 hasConceptScore W1975089129C200601418 @default.
- W1975089129 hasConceptScore W1975089129C204983608 @default.
- W1975089129 hasConceptScore W1975089129C21880701 @default.
- W1975089129 hasConceptScore W1975089129C2778348673 @default.
- W1975089129 hasConceptScore W1975089129C33923547 @default.
- W1975089129 hasConceptScore W1975089129C39432304 @default.
- W1975089129 hasConceptScore W1975089129C41008148 @default.
- W1975089129 hasConceptScore W1975089129C66018809 @default.
- W1975089129 hasConceptScore W1975089129C78519656 @default.
- W1975089129 hasConceptScore W1975089129C79403827 @default.
- W1975089129 hasConceptScore W1975089129C99862985 @default.
- W1975089129 hasLocation W19750891291 @default.
- W1975089129 hasOpenAccess W1975089129 @default.
- W1975089129 hasPrimaryLocation W19750891291 @default.
- W1975089129 hasRelatedWork W1412079731 @default.
- W1975089129 hasRelatedWork W1569794200 @default.
- W1975089129 hasRelatedWork W2063419869 @default.
- W1975089129 hasRelatedWork W2129431599 @default.
- W1975089129 hasRelatedWork W2147229891 @default.
- W1975089129 hasRelatedWork W2147973445 @default.
- W1975089129 hasRelatedWork W2327254200 @default.
- W1975089129 hasRelatedWork W2899084033 @default.
- W1975089129 hasRelatedWork W2991245793 @default.
- W1975089129 hasRelatedWork W4313286066 @default.
- W1975089129 isParatext "false" @default.
- W1975089129 isRetracted "false" @default.
- W1975089129 magId "1975089129" @default.
- W1975089129 workType "article" @default.