Matches in SemOpenAlex for { <https://semopenalex.org/work/W1975347422> ?p ?o ?g. }
Showing items 1 to 81 of
81
with 100 items per page.
- W1975347422 abstract "The field of laser micromachining is highly diverse. There are many different types of lasers available in the market. Due to their differences in irradiating wavelength, output power and pulse characteristic they can be selected for different applications depending on material and feature size [1]. The main issues by using these lasers are heat damages, contamination and low ablation rates. This report examines on the application of the Laser MicroJet(R) (LMJ), a unique combination of a laser beam with a hair-thin water jet as a universal tool for micro-machining of MEMS substrates, as well as ferrous and non-ferrous materials. The materials include gallium arsenide (GaAs) & silicon wafers, steel, tantalum and alumina ceramic. A Nd:YAG laser operating at 1064 nm (infra red) and frequency doubled 532 nm (green) were employed for the micro-machining of these materials." @default.
- W1975347422 created "2016-06-24" @default.
- W1975347422 creator A5022388228 @default.
- W1975347422 creator A5027942176 @default.
- W1975347422 creator A5040839325 @default.
- W1975347422 creator A5077684466 @default.
- W1975347422 creator A5084089866 @default.
- W1975347422 date "2007-02-08" @default.
- W1975347422 modified "2023-10-18" @default.
- W1975347422 title "The Laser MicroJet (LMJ): a multi-solution technology for high quality micro-machining" @default.
- W1975347422 doi "https://doi.org/10.1117/12.701070" @default.
- W1975347422 hasPublicationYear "2007" @default.
- W1975347422 type Work @default.
- W1975347422 sameAs 1975347422 @default.
- W1975347422 citedByCount "8" @default.
- W1975347422 countsByYear W19753474222012 @default.
- W1975347422 countsByYear W19753474222019 @default.
- W1975347422 countsByYear W19753474222021 @default.
- W1975347422 crossrefType "proceedings-article" @default.
- W1975347422 hasAuthorship W1975347422A5022388228 @default.
- W1975347422 hasAuthorship W1975347422A5027942176 @default.
- W1975347422 hasAuthorship W1975347422A5040839325 @default.
- W1975347422 hasAuthorship W1975347422A5077684466 @default.
- W1975347422 hasAuthorship W1975347422A5084089866 @default.
- W1975347422 hasBestOaLocation W19753474222 @default.
- W1975347422 hasConcept C120665830 @default.
- W1975347422 hasConcept C121332964 @default.
- W1975347422 hasConcept C134132462 @default.
- W1975347422 hasConcept C136525101 @default.
- W1975347422 hasConcept C142724271 @default.
- W1975347422 hasConcept C145667562 @default.
- W1975347422 hasConcept C160671074 @default.
- W1975347422 hasConcept C191897082 @default.
- W1975347422 hasConcept C192562407 @default.
- W1975347422 hasConcept C204787440 @default.
- W1975347422 hasConcept C2778386843 @default.
- W1975347422 hasConcept C2779188808 @default.
- W1975347422 hasConcept C2984025587 @default.
- W1975347422 hasConcept C37977207 @default.
- W1975347422 hasConcept C49040817 @default.
- W1975347422 hasConcept C520434653 @default.
- W1975347422 hasConcept C523214423 @default.
- W1975347422 hasConcept C544956773 @default.
- W1975347422 hasConcept C71924100 @default.
- W1975347422 hasConceptScore W1975347422C120665830 @default.
- W1975347422 hasConceptScore W1975347422C121332964 @default.
- W1975347422 hasConceptScore W1975347422C134132462 @default.
- W1975347422 hasConceptScore W1975347422C136525101 @default.
- W1975347422 hasConceptScore W1975347422C142724271 @default.
- W1975347422 hasConceptScore W1975347422C145667562 @default.
- W1975347422 hasConceptScore W1975347422C160671074 @default.
- W1975347422 hasConceptScore W1975347422C191897082 @default.
- W1975347422 hasConceptScore W1975347422C192562407 @default.
- W1975347422 hasConceptScore W1975347422C204787440 @default.
- W1975347422 hasConceptScore W1975347422C2778386843 @default.
- W1975347422 hasConceptScore W1975347422C2779188808 @default.
- W1975347422 hasConceptScore W1975347422C2984025587 @default.
- W1975347422 hasConceptScore W1975347422C37977207 @default.
- W1975347422 hasConceptScore W1975347422C49040817 @default.
- W1975347422 hasConceptScore W1975347422C520434653 @default.
- W1975347422 hasConceptScore W1975347422C523214423 @default.
- W1975347422 hasConceptScore W1975347422C544956773 @default.
- W1975347422 hasConceptScore W1975347422C71924100 @default.
- W1975347422 hasLocation W19753474221 @default.
- W1975347422 hasLocation W19753474222 @default.
- W1975347422 hasOpenAccess W1975347422 @default.
- W1975347422 hasPrimaryLocation W19753474221 @default.
- W1975347422 hasRelatedWork W1964153258 @default.
- W1975347422 hasRelatedWork W1976204977 @default.
- W1975347422 hasRelatedWork W2033679549 @default.
- W1975347422 hasRelatedWork W3113148492 @default.
- W1975347422 hasRelatedWork W3124119431 @default.
- W1975347422 hasRelatedWork W3134766052 @default.
- W1975347422 hasRelatedWork W3156435120 @default.
- W1975347422 hasRelatedWork W4210818449 @default.
- W1975347422 hasRelatedWork W4287323973 @default.
- W1975347422 hasRelatedWork W806869009 @default.
- W1975347422 isParatext "false" @default.
- W1975347422 isRetracted "false" @default.
- W1975347422 magId "1975347422" @default.
- W1975347422 workType "article" @default.