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- W1975385620 abstract "Abstract There are very specific demands on the plasma processes used in various plasma technological applications. Microwave plasmas offer a wide range of applications for different pressures ranging from very low pressure (<0.1 Pa) over low pressure (0.1‐100 Pa) and medium pressure (10 3 ‐10 4 Pa) up to atmospheric pressure (10 5 Pa). This contribution is a short review on some microwave based plasma sources at different pressure ranges and a brief introduction into the plasma physics behind them (© 2012 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)" @default.
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- W1975385620 date "2012-08-01" @default.
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- W1975385620 title "Scalable Microwave Plasma Sources From Low to Atmospheric Pressure" @default.
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- W1975385620 doi "https://doi.org/10.1002/ctpp.201210057" @default.
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