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• W1975415588 abstract "Thin film bulk acoustic resonators are fabricated by using silicon bulk micromachining technology, which are constructed mainly from aluminium nitride (AlN) piezoelectric films. The results of x-ray diffraction, scanning electron microscopy and atomic force microscopy show that the AlN films exhibit highly c-axis orientation with good surface morphology. The resonators with the AlN films possessed a reflection coefficient -10.6 dB at the resonant frequency 2.537 GHz, an effective electromechanical coupling coefficient 3.75%, series quality 101.8, and parallel quality 79.7." @default.
• W1975415588 created "2016-06-24" @default.
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• W1975415588 date "2006-10-26" @default.
• W1975415588 modified "2023-10-16" @default.
• W1975415588 title "Fabrication and Characteristics of Thin Film Bulk Acoustic Resonators with Highly c -Axis Oriented AlN Films" @default.
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• W1975415588 doi "https://doi.org/10.1088/0256-307x/23/11/063" @default.
• W1975415588 hasPublicationYear "2006" @default.
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