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• W1975425809 abstract "Silicon-on-Insulator (SOI) technology, with unique properties such as harsh environment resistance and lower power consumption [1], is presented here as a platform for CMOS and MEMS co-integration. An original CMOS-compatible process has been developed for the design and the co-fabrication of out-of-plane (3D) movable cantilevers and ring oscillators (RO) circuits on the same chip. The measured transducer, by deflection of the out-of-plane MEMS component, shows until 10% variation of the frequency under different flow rates." @default.
• W1975425809 created "2016-06-24" @default.
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• W1975425809 date "2010-01-01" @default.
• W1975425809 modified "2023-09-27" @default.
• W1975425809 title "Ultra low power flow-to-frequency SOI MEMS transducer" @default.
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• W1975425809 doi "https://doi.org/10.1016/j.proeng.2010.09.166" @default.
• W1975425809 hasPublicationYear "2010" @default.
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