FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W1975678296> ?p ?o ?g. }

• W1975678296 endingPage "H604" @default.
• W1975678296 startingPage "H604" @default.
• W1975678296 abstract "This paper reports a detailed study of several hydrogen-based plasma cleans prior to plasma-enhanced chemical vapor deposition of silicon carbonitride cap films, and it finds a tradeoff between improved electromigration and increased copper resistivity. Previously proposed mechanisms do not explain this tradeoff, and we propose an alternative mechanism for the cap/copper interface modification. Electromigration is improved by forming a copper silicide interfacial layer, but the copper resistivity is also increased by silicon diffusion into the copper from the cap/copper interface. Hydrogen-based plasmas generate silicon by reacting with the silicon nitride seasoning layer on the chamber surfaces and transporting the silicon to the copper surface. The transport of silicon can be prevented by adding nitrogen to the plasma or removing the seasoning layer." @default.
• W1975678296 created "2016-06-24" @default.
• W1975678296 creator A5009759779 @default.
• W1975678296 creator A5018104184 @default.
• W1975678296 creator A5020248419 @default.
• W1975678296 creator A5023348921 @default.
• W1975678296 creator A5034420112 @default.
• W1975678296 creator A5036747343 @default.
• W1975678296 creator A5062074929 @default.
• W1975678296 creator A5076293916 @default.
• W1975678296 creator A5087591078 @default.
• W1975678296 creator A5088961543 @default.
• W1975678296 date "2007-01-01" @default.
• W1975678296 modified "2023-09-27" @default.
• W1975678296 title "Line Resistance and Electromigration Variations Induced by Hydrogen-Based Plasma Modifications to the Silicon Carbonitride/Copper Interface" @default.
• W1975678296 cites W183464528 @default.
• W1975678296 cites W1966815625 @default.
• W1975678296 cites W1976947690 @default.
• W1975678296 cites W1979198426 @default.
• W1975678296 cites W1997326261 @default.
• W1975678296 cites W1999334974 @default.
• W1975678296 cites W1999843232 @default.
• W1975678296 cites W2010801238 @default.
• W1975678296 cites W2021118719 @default.
• W1975678296 cites W2026014341 @default.
• W1975678296 cites W2037391919 @default.
• W1975678296 cites W2045175736 @default.
• W1975678296 cites W2046384069 @default.
• W1975678296 cites W2052956262 @default.
• W1975678296 cites W2054061894 @default.
• W1975678296 cites W2067528876 @default.
• W1975678296 cites W2088866308 @default.
• W1975678296 cites W2091775915 @default.
• W1975678296 cites W2101096828 @default.
• W1975678296 cites W2115054442 @default.
• W1975678296 doi "https://doi.org/10.1149/1.2736655" @default.
• W1975678296 hasPublicationYear "2007" @default.
• W1975678296 type Work @default.
• W1975678296 sameAs 1975678296 @default.
• W1975678296 citedByCount "6" @default.
• W1975678296 countsByYear W19756782962012 @default.
• W1975678296 crossrefType "journal-article" @default.
• W1975678296 hasAuthorship W1975678296A5009759779 @default.
• W1975678296 hasAuthorship W1975678296A5018104184 @default.
• W1975678296 hasAuthorship W1975678296A5020248419 @default.
• W1975678296 hasAuthorship W1975678296A5023348921 @default.
• W1975678296 hasAuthorship W1975678296A5034420112 @default.
• W1975678296 hasAuthorship W1975678296A5036747343 @default.
• W1975678296 hasAuthorship W1975678296A5062074929 @default.
• W1975678296 hasAuthorship W1975678296A5076293916 @default.
• W1975678296 hasAuthorship W1975678296A5087591078 @default.
• W1975678296 hasAuthorship W1975678296A5088961543 @default.
• W1975678296 hasConcept C121332964 @default.
• W1975678296 hasConcept C138055206 @default.
• W1975678296 hasConcept C159985019 @default.
• W1975678296 hasConcept C171250308 @default.
• W1975678296 hasConcept C178790620 @default.
• W1975678296 hasConcept C185592680 @default.
• W1975678296 hasConcept C191897082 @default.
• W1975678296 hasConcept C192562407 @default.
• W1975678296 hasConcept C2777431650 @default.
• W1975678296 hasConcept C2779227376 @default.
• W1975678296 hasConcept C512968161 @default.
• W1975678296 hasConcept C544778455 @default.
• W1975678296 hasConcept C544956773 @default.
• W1975678296 hasConcept C57410435 @default.
• W1975678296 hasConcept C62520636 @default.
• W1975678296 hasConcept C82706917 @default.
• W1975678296 hasConceptScore W1975678296C121332964 @default.
• W1975678296 hasConceptScore W1975678296C138055206 @default.
• W1975678296 hasConceptScore W1975678296C159985019 @default.
• W1975678296 hasConceptScore W1975678296C171250308 @default.
• W1975678296 hasConceptScore W1975678296C178790620 @default.
• W1975678296 hasConceptScore W1975678296C185592680 @default.
• W1975678296 hasConceptScore W1975678296C191897082 @default.
• W1975678296 hasConceptScore W1975678296C192562407 @default.
• W1975678296 hasConceptScore W1975678296C2777431650 @default.
• W1975678296 hasConceptScore W1975678296C2779227376 @default.
• W1975678296 hasConceptScore W1975678296C512968161 @default.
• W1975678296 hasConceptScore W1975678296C544778455 @default.
• W1975678296 hasConceptScore W1975678296C544956773 @default.
• W1975678296 hasConceptScore W1975678296C57410435 @default.
• W1975678296 hasConceptScore W1975678296C62520636 @default.
• W1975678296 hasConceptScore W1975678296C82706917 @default.
• W1975678296 hasIssue "7" @default.
• W1975678296 hasLocation W19756782961 @default.
• W1975678296 hasOpenAccess W1975678296 @default.
• W1975678296 hasPrimaryLocation W19756782961 @default.
• W1975678296 hasRelatedWork W1767632387 @default.
• W1975678296 hasRelatedWork W1846200327 @default.
• W1975678296 hasRelatedWork W2041018982 @default.
• W1975678296 hasRelatedWork W2057491857 @default.
• W1975678296 hasRelatedWork W2153055803 @default.
• W1975678296 hasRelatedWork W2158417570 @default.
• W1975678296 hasRelatedWork W2275363478 @default.
• W1975678296 hasRelatedWork W2738246996 @default.
• W1975678296 hasRelatedWork W3139688169 @default.
• W1975678296 hasRelatedWork W4220980369 @default.

• next