Matches in SemOpenAlex for { <https://semopenalex.org/work/W1975692769> ?p ?o ?g. }
Showing items 1 to 78 of
78
with 100 items per page.
- W1975692769 endingPage "1811" @default.
- W1975692769 startingPage "1806" @default.
- W1975692769 abstract "Titanium thin films were deposited by RF sputtering on lightly and heavily arsenic‐implanted silicon wafers. These wafers were treated by means of a rapid thermal graphite heater in vacuum for different times and temperatures. The silicide formation and the arsenic behavior, in the substrate, are studied by means of XRD, AES, RBS, and four‐point probe measurements. At the initial stage a high concentration of oxygen and carbon is incorporated in the film and a titanium rich silicide is formed. For longer times and intermediate temperatures (550°–700°C) a three‐layer film is formed: . By increasing temperature, in the same range, the layer grows thicker, and its formation results in the repulsion of oxygen and carbon. Meanwhile, the titanium‐rich silicide vanishes. At higher temperature (800°C) the phase is obtained promptly after the initial stage. Arsenic presents an inhibition effect on silicide formation at the intermediate temperature range and seems to ease the transformation from to phase. An arsenic snowplow effect is observed for short treatments at 800°C and an increasing arsenic loss is observed with increasing time and temperature. A higher final arsenic concentration in the substrate is observed for formed by a two‐step treatment, as in the Salicide process, compared with a single treatment at high temperature (800°C)." @default.
- W1975692769 created "2016-06-24" @default.
- W1975692769 creator A5043257515 @default.
- W1975692769 creator A5078844204 @default.
- W1975692769 date "1989-06-01" @default.
- W1975692769 modified "2023-09-26" @default.
- W1975692769 title "Titanium Silicide Formation and Arsenic Dopant Behavior under Rapid Thermal Treatments in Vacuum" @default.
- W1975692769 doi "https://doi.org/10.1149/1.2097018" @default.
- W1975692769 hasPublicationYear "1989" @default.
- W1975692769 type Work @default.
- W1975692769 sameAs 1975692769 @default.
- W1975692769 citedByCount "6" @default.
- W1975692769 crossrefType "journal-article" @default.
- W1975692769 hasAuthorship W1975692769A5043257515 @default.
- W1975692769 hasAuthorship W1975692769A5078844204 @default.
- W1975692769 hasConcept C111368507 @default.
- W1975692769 hasConcept C113196181 @default.
- W1975692769 hasConcept C121332964 @default.
- W1975692769 hasConcept C127313418 @default.
- W1975692769 hasConcept C127413603 @default.
- W1975692769 hasConcept C153294291 @default.
- W1975692769 hasConcept C160671074 @default.
- W1975692769 hasConcept C171250308 @default.
- W1975692769 hasConcept C173118649 @default.
- W1975692769 hasConcept C185592680 @default.
- W1975692769 hasConcept C191897082 @default.
- W1975692769 hasConcept C192562407 @default.
- W1975692769 hasConcept C2777289219 @default.
- W1975692769 hasConcept C2780901251 @default.
- W1975692769 hasConcept C39353612 @default.
- W1975692769 hasConcept C42360764 @default.
- W1975692769 hasConcept C43617362 @default.
- W1975692769 hasConcept C502230775 @default.
- W1975692769 hasConcept C506065880 @default.
- W1975692769 hasConcept C544956773 @default.
- W1975692769 hasConcept C549387045 @default.
- W1975692769 hasConceptScore W1975692769C111368507 @default.
- W1975692769 hasConceptScore W1975692769C113196181 @default.
- W1975692769 hasConceptScore W1975692769C121332964 @default.
- W1975692769 hasConceptScore W1975692769C127313418 @default.
- W1975692769 hasConceptScore W1975692769C127413603 @default.
- W1975692769 hasConceptScore W1975692769C153294291 @default.
- W1975692769 hasConceptScore W1975692769C160671074 @default.
- W1975692769 hasConceptScore W1975692769C171250308 @default.
- W1975692769 hasConceptScore W1975692769C173118649 @default.
- W1975692769 hasConceptScore W1975692769C185592680 @default.
- W1975692769 hasConceptScore W1975692769C191897082 @default.
- W1975692769 hasConceptScore W1975692769C192562407 @default.
- W1975692769 hasConceptScore W1975692769C2777289219 @default.
- W1975692769 hasConceptScore W1975692769C2780901251 @default.
- W1975692769 hasConceptScore W1975692769C39353612 @default.
- W1975692769 hasConceptScore W1975692769C42360764 @default.
- W1975692769 hasConceptScore W1975692769C43617362 @default.
- W1975692769 hasConceptScore W1975692769C502230775 @default.
- W1975692769 hasConceptScore W1975692769C506065880 @default.
- W1975692769 hasConceptScore W1975692769C544956773 @default.
- W1975692769 hasConceptScore W1975692769C549387045 @default.
- W1975692769 hasIssue "6" @default.
- W1975692769 hasLocation W19756927691 @default.
- W1975692769 hasOpenAccess W1975692769 @default.
- W1975692769 hasPrimaryLocation W19756927691 @default.
- W1975692769 hasRelatedWork W1983443762 @default.
- W1975692769 hasRelatedWork W1995118128 @default.
- W1975692769 hasRelatedWork W2003288831 @default.
- W1975692769 hasRelatedWork W2013557620 @default.
- W1975692769 hasRelatedWork W2040207499 @default.
- W1975692769 hasRelatedWork W2097767931 @default.
- W1975692769 hasRelatedWork W2116171376 @default.
- W1975692769 hasRelatedWork W2150512723 @default.
- W1975692769 hasRelatedWork W2346882948 @default.
- W1975692769 hasRelatedWork W4253328832 @default.
- W1975692769 hasVolume "136" @default.
- W1975692769 isParatext "false" @default.
- W1975692769 isRetracted "false" @default.
- W1975692769 magId "1975692769" @default.
- W1975692769 workType "article" @default.