Matches in SemOpenAlex for { <https://semopenalex.org/work/W1975696414> ?p ?o ?g. }
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- W1975696414 endingPage "346" @default.
- W1975696414 startingPage "343" @default.
- W1975696414 abstract "A sputtering target system utilizing high vacuum as the electrical insulator is described. This technique permits the application of high rf power to the target. Power up to 5000 W has been applied to a 7.3-cm-diam electrode bonded to a 10-cm-diam Al2O3 target. Under the proper conditions of geometry, gas pressure, and magnetic field, this has resulted in deposition rates of Al2O3 in excess of 6300 Å/min. For an SiO2 target with 3000-W input, deposition rates in excess of 10 000 Å/min have been obtained. Typical deposition rates of Al2O3, are given for this target system as a function of rf power, magnetic field, and gas pressure." @default.
- W1975696414 created "2016-06-24" @default.
- W1975696414 creator A5052400022 @default.
- W1975696414 creator A5060065599 @default.
- W1975696414 creator A5065540058 @default.
- W1975696414 date "1970-03-01" @default.
- W1975696414 modified "2023-09-26" @default.
- W1975696414 title "High-Rate rf Sputtering System" @default.
- W1975696414 doi "https://doi.org/10.1116/1.1315854" @default.
- W1975696414 hasPublicationYear "1970" @default.
- W1975696414 type Work @default.
- W1975696414 sameAs 1975696414 @default.
- W1975696414 citedByCount "13" @default.
- W1975696414 countsByYear W19756964142018 @default.
- W1975696414 countsByYear W19756964142019 @default.
- W1975696414 crossrefType "journal-article" @default.
- W1975696414 hasAuthorship W1975696414A5052400022 @default.
- W1975696414 hasAuthorship W1975696414A5060065599 @default.
- W1975696414 hasAuthorship W1975696414A5065540058 @default.
- W1975696414 hasConcept C113196181 @default.
- W1975696414 hasConcept C115260700 @default.
- W1975696414 hasConcept C119599485 @default.
- W1975696414 hasConcept C121332964 @default.
- W1975696414 hasConcept C127413603 @default.
- W1975696414 hasConcept C147789679 @default.
- W1975696414 hasConcept C151730666 @default.
- W1975696414 hasConcept C171250308 @default.
- W1975696414 hasConcept C17525397 @default.
- W1975696414 hasConcept C184779094 @default.
- W1975696414 hasConcept C185592680 @default.
- W1975696414 hasConcept C19067145 @default.
- W1975696414 hasConcept C192562407 @default.
- W1975696414 hasConcept C194257627 @default.
- W1975696414 hasConcept C196054291 @default.
- W1975696414 hasConcept C212702 @default.
- W1975696414 hasConcept C22423302 @default.
- W1975696414 hasConcept C2816523 @default.
- W1975696414 hasConcept C2987918405 @default.
- W1975696414 hasConcept C43617362 @default.
- W1975696414 hasConcept C46141821 @default.
- W1975696414 hasConcept C46362747 @default.
- W1975696414 hasConcept C49040817 @default.
- W1975696414 hasConcept C62520636 @default.
- W1975696414 hasConcept C64297162 @default.
- W1975696414 hasConcept C74064498 @default.
- W1975696414 hasConcept C78762247 @default.
- W1975696414 hasConcept C86803240 @default.
- W1975696414 hasConceptScore W1975696414C113196181 @default.
- W1975696414 hasConceptScore W1975696414C115260700 @default.
- W1975696414 hasConceptScore W1975696414C119599485 @default.
- W1975696414 hasConceptScore W1975696414C121332964 @default.
- W1975696414 hasConceptScore W1975696414C127413603 @default.
- W1975696414 hasConceptScore W1975696414C147789679 @default.
- W1975696414 hasConceptScore W1975696414C151730666 @default.
- W1975696414 hasConceptScore W1975696414C171250308 @default.
- W1975696414 hasConceptScore W1975696414C17525397 @default.
- W1975696414 hasConceptScore W1975696414C184779094 @default.
- W1975696414 hasConceptScore W1975696414C185592680 @default.
- W1975696414 hasConceptScore W1975696414C19067145 @default.
- W1975696414 hasConceptScore W1975696414C192562407 @default.
- W1975696414 hasConceptScore W1975696414C194257627 @default.
- W1975696414 hasConceptScore W1975696414C196054291 @default.
- W1975696414 hasConceptScore W1975696414C212702 @default.
- W1975696414 hasConceptScore W1975696414C22423302 @default.
- W1975696414 hasConceptScore W1975696414C2816523 @default.
- W1975696414 hasConceptScore W1975696414C2987918405 @default.
- W1975696414 hasConceptScore W1975696414C43617362 @default.
- W1975696414 hasConceptScore W1975696414C46141821 @default.
- W1975696414 hasConceptScore W1975696414C46362747 @default.
- W1975696414 hasConceptScore W1975696414C49040817 @default.
- W1975696414 hasConceptScore W1975696414C62520636 @default.
- W1975696414 hasConceptScore W1975696414C64297162 @default.
- W1975696414 hasConceptScore W1975696414C74064498 @default.
- W1975696414 hasConceptScore W1975696414C78762247 @default.
- W1975696414 hasConceptScore W1975696414C86803240 @default.
- W1975696414 hasIssue "2" @default.
- W1975696414 hasLocation W19756964141 @default.
- W1975696414 hasOpenAccess W1975696414 @default.
- W1975696414 hasPrimaryLocation W19756964141 @default.
- W1975696414 hasRelatedWork W1972285736 @default.
- W1975696414 hasRelatedWork W1975696414 @default.
- W1975696414 hasRelatedWork W1981744904 @default.
- W1975696414 hasRelatedWork W2027907199 @default.
- W1975696414 hasRelatedWork W2061346485 @default.
- W1975696414 hasRelatedWork W2116540660 @default.
- W1975696414 hasRelatedWork W2350857105 @default.
- W1975696414 hasRelatedWork W2354838977 @default.
- W1975696414 hasRelatedWork W2363051731 @default.
- W1975696414 hasRelatedWork W2899084033 @default.
- W1975696414 hasVolume "7" @default.
- W1975696414 isParatext "false" @default.
- W1975696414 isRetracted "false" @default.
- W1975696414 magId "1975696414" @default.
- W1975696414 workType "article" @default.