Matches in SemOpenAlex for { <https://semopenalex.org/work/W1975739461> ?p ?o ?g. }
Showing items 1 to 99 of
99
with 100 items per page.
- W1975739461 endingPage "410" @default.
- W1975739461 startingPage "401" @default.
- W1975739461 abstract "The current status of EUV resists is reviewed based on performance studies of line edge roughness (LER), sensitivity, resolution and pattern transfer. A large variation in polymer molecular weight (2.9-33.5 K g/mol) is found to have little effect on LER. Dissolution properties such as unexposed film thickness loss (UFTL) are shown to have a large effect on LER. Increasing resist contrast and image contrast are shown to improve resist LER. Variation in base level within resists based on EUV-2D shows a clear trade-off between sensitivity and LER. Acid difusion can play an important role in determining LER. Resist resolution and image transfer capabilities are also discussed." @default.
- W1975739461 created "2016-06-24" @default.
- W1975739461 creator A5053233504 @default.
- W1975739461 creator A5054635508 @default.
- W1975739461 creator A5089948718 @default.
- W1975739461 date "2003-01-01" @default.
- W1975739461 modified "2023-10-16" @default.
- W1975739461 title "Current Status of EUV Photoresists" @default.
- W1975739461 cites W1963852948 @default.
- W1975739461 cites W1963983550 @default.
- W1975739461 cites W1981577823 @default.
- W1975739461 cites W1989089234 @default.
- W1975739461 cites W1992574978 @default.
- W1975739461 cites W1998105987 @default.
- W1975739461 cites W2003230236 @default.
- W1975739461 cites W2018283098 @default.
- W1975739461 cites W2029160955 @default.
- W1975739461 cites W2040198648 @default.
- W1975739461 cites W2041684528 @default.
- W1975739461 cites W2050823050 @default.
- W1975739461 cites W2067697261 @default.
- W1975739461 cites W2091091494 @default.
- W1975739461 cites W2146467105 @default.
- W1975739461 doi "https://doi.org/10.2494/photopolymer.16.401" @default.
- W1975739461 hasPublicationYear "2003" @default.
- W1975739461 type Work @default.
- W1975739461 sameAs 1975739461 @default.
- W1975739461 citedByCount "42" @default.
- W1975739461 countsByYear W19757394612012 @default.
- W1975739461 countsByYear W19757394612013 @default.
- W1975739461 countsByYear W19757394612014 @default.
- W1975739461 countsByYear W19757394612022 @default.
- W1975739461 countsByYear W19757394612023 @default.
- W1975739461 crossrefType "journal-article" @default.
- W1975739461 hasAuthorship W1975739461A5053233504 @default.
- W1975739461 hasAuthorship W1975739461A5054635508 @default.
- W1975739461 hasAuthorship W1975739461A5089948718 @default.
- W1975739461 hasBestOaLocation W19757394611 @default.
- W1975739461 hasConcept C115961682 @default.
- W1975739461 hasConcept C120665830 @default.
- W1975739461 hasConcept C121332964 @default.
- W1975739461 hasConcept C127413603 @default.
- W1975739461 hasConcept C134406635 @default.
- W1975739461 hasConcept C146024833 @default.
- W1975739461 hasConcept C154945302 @default.
- W1975739461 hasConcept C159985019 @default.
- W1975739461 hasConcept C162996421 @default.
- W1975739461 hasConcept C171250308 @default.
- W1975739461 hasConcept C192562407 @default.
- W1975739461 hasConcept C2776429412 @default.
- W1975739461 hasConcept C2779227376 @default.
- W1975739461 hasConcept C41008148 @default.
- W1975739461 hasConcept C42360764 @default.
- W1975739461 hasConcept C49040817 @default.
- W1975739461 hasConcept C520434653 @default.
- W1975739461 hasConcept C53524968 @default.
- W1975739461 hasConcept C71039073 @default.
- W1975739461 hasConcept C88380143 @default.
- W1975739461 hasConceptScore W1975739461C115961682 @default.
- W1975739461 hasConceptScore W1975739461C120665830 @default.
- W1975739461 hasConceptScore W1975739461C121332964 @default.
- W1975739461 hasConceptScore W1975739461C127413603 @default.
- W1975739461 hasConceptScore W1975739461C134406635 @default.
- W1975739461 hasConceptScore W1975739461C146024833 @default.
- W1975739461 hasConceptScore W1975739461C154945302 @default.
- W1975739461 hasConceptScore W1975739461C159985019 @default.
- W1975739461 hasConceptScore W1975739461C162996421 @default.
- W1975739461 hasConceptScore W1975739461C171250308 @default.
- W1975739461 hasConceptScore W1975739461C192562407 @default.
- W1975739461 hasConceptScore W1975739461C2776429412 @default.
- W1975739461 hasConceptScore W1975739461C2779227376 @default.
- W1975739461 hasConceptScore W1975739461C41008148 @default.
- W1975739461 hasConceptScore W1975739461C42360764 @default.
- W1975739461 hasConceptScore W1975739461C49040817 @default.
- W1975739461 hasConceptScore W1975739461C520434653 @default.
- W1975739461 hasConceptScore W1975739461C53524968 @default.
- W1975739461 hasConceptScore W1975739461C71039073 @default.
- W1975739461 hasConceptScore W1975739461C88380143 @default.
- W1975739461 hasIssue "3" @default.
- W1975739461 hasLocation W19757394611 @default.
- W1975739461 hasOpenAccess W1975739461 @default.
- W1975739461 hasPrimaryLocation W19757394611 @default.
- W1975739461 hasRelatedWork W1981558927 @default.
- W1975739461 hasRelatedWork W1990950348 @default.
- W1975739461 hasRelatedWork W1999595755 @default.
- W1975739461 hasRelatedWork W2039109053 @default.
- W1975739461 hasRelatedWork W2045098484 @default.
- W1975739461 hasRelatedWork W2068898653 @default.
- W1975739461 hasRelatedWork W2141625811 @default.
- W1975739461 hasRelatedWork W2321285900 @default.
- W1975739461 hasRelatedWork W2920584510 @default.
- W1975739461 hasRelatedWork W4378647859 @default.
- W1975739461 hasVolume "16" @default.
- W1975739461 isParatext "false" @default.
- W1975739461 isRetracted "false" @default.
- W1975739461 magId "1975739461" @default.
- W1975739461 workType "article" @default.