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• W1975774421 abstract "The atomic layer deposition (ALD) of a series of inorganic thin films on an interfacial organic layer has been examined, focusing on the existence of a delay in thin film nucleation and its dependence on the chemistry of each ALD reaction. The inorganic thin films examined were Al2O3, HfO2, Ta2O5, and TaNx, while the organic layer was a thin (∼5 Å thick) film of poly(ethylene imine), or PEI, on SiO2. The early stages (&lt;50 ALD cycles) of inorganic thin film growth in each case have been characterized using a combination of surface-sensitive techniques including ellipsometry, x-ray photoelectron spectroscopy, and atomic force microscopy. PEI has the effect of attenuating growth to different degrees depending on the subsequently grown ALD thin film, leading to no attenuation of growth for Al2O3, but significant incubation periods, in increasing order, for Ta2O5, HfO2 and TaNx. Angle-resolved x-ray photoelectron spectroscopy of an Al2O3 thin film deposited on PEI|SiO2 demonstrates that, in this case, the PEI thin film is buried between the Al2O3 thin film and the SiO2 substrate, with no significant decrease in the density of nitrogen from the as deposited PEI film. Results from the HfO2 and the Ta-containing thin films indicate that the processes that lead to the attenuation of growth are associated mostly with the second half-cycle of ALD (H2O or NH3 exposure). The length of the incubation time is found to correlate with both the total enthalpy change of the overall ALD reaction, as well as the net internal energy change of a single ligand exchange reaction representative of the second half of the ALD reaction. These results suggest that the reaction thermochemistry, and activation barriers for the reactions involved the ALD process play a key role in determining the length of the incubation period caused by PEI." @default.
• W1975774421 created "2016-06-24" @default.
• W1975774421 creator A5049610374 @default.
• W1975774421 creator A5075426222 @default.
• W1975774421 date "2011-09-01" @default.
• W1975774421 modified "2023-09-27" @default.
• W1975774421 title "Nucleation delay in atomic layer deposition on a thin organic layer and the role of reaction thermochemistry" @default.
• W1975774421 cites W1558886769 @default.
• W1975774421 cites W1968881618 @default.
• W1975774421 cites W1977867673 @default.
• W1975774421 cites W1978354512 @default.
• W1975774421 cites W1978607450 @default.
• W1975774421 cites W1984391513 @default.
• W1975774421 cites W1984708054 @default.
• W1975774421 cites W1992214743 @default.
• W1975774421 cites W1996003259 @default.
• W1975774421 cites W1997559003 @default.
• W1975774421 cites W1998927885 @default.
• W1975774421 cites W1999417288 @default.
• W1975774421 cites W2010716222 @default.
• W1975774421 cites W2011754943 @default.
• W1975774421 cites W2012374643 @default.
• W1975774421 cites W2012895228 @default.
• W1975774421 cites W2012900432 @default.
• W1975774421 cites W2025158389 @default.
• W1975774421 cites W2028379218 @default.
• W1975774421 cites W2030675563 @default.
• W1975774421 cites W2030859767 @default.
• W1975774421 cites W2033451618 @default.
• W1975774421 cites W2040287492 @default.
• W1975774421 cites W2041246757 @default.
• W1975774421 cites W2041741617 @default.
• W1975774421 cites W2046142803 @default.
• W1975774421 cites W2049667872 @default.
• W1975774421 cites W2049765873 @default.
• W1975774421 cites W2054974360 @default.
• W1975774421 cites W2063003400 @default.
• W1975774421 cites W2064874384 @default.
• W1975774421 cites W2068128923 @default.
• W1975774421 cites W2068371561 @default.
• W1975774421 cites W2078984816 @default.
• W1975774421 cites W2083731597 @default.
• W1975774421 cites W2086306649 @default.
• W1975774421 cites W2089602517 @default.
• W1975774421 cites W2089719526 @default.
• W1975774421 cites W2095183381 @default.
• W1975774421 cites W2100370822 @default.
• W1975774421 cites W2102823566 @default.
• W1975774421 cites W2152590636 @default.
• W1975774421 cites W4231389798 @default.
• W1975774421 cites W4232142816 @default.
• W1975774421 doi "https://doi.org/10.1116/1.3625564" @default.
• W1975774421 hasPublicationYear "2011" @default.
• W1975774421 type Work @default.
• W1975774421 sameAs 1975774421 @default.
• W1975774421 citedByCount "27" @default.
• W1975774421 countsByYear W19757744212012 @default.
• W1975774421 countsByYear W19757744212013 @default.
• W1975774421 countsByYear W19757744212015 @default.
• W1975774421 countsByYear W19757744212016 @default.
• W1975774421 countsByYear W19757744212017 @default.
• W1975774421 countsByYear W19757744212018 @default.
• W1975774421 countsByYear W19757744212019 @default.
• W1975774421 countsByYear W19757744212020 @default.
• W1975774421 countsByYear W19757744212021 @default.
• W1975774421 countsByYear W19757744212022 @default.
• W1975774421 countsByYear W19757744212023 @default.
• W1975774421 crossrefType "journal-article" @default.
• W1975774421 hasAuthorship W1975774421A5049610374 @default.
• W1975774421 hasAuthorship W1975774421A5075426222 @default.
• W1975774421 hasConcept C111368507 @default.
• W1975774421 hasConcept C113196181 @default.
• W1975774421 hasConcept C127313418 @default.
• W1975774421 hasConcept C127413603 @default.
• W1975774421 hasConcept C171250308 @default.
• W1975774421 hasConcept C175708663 @default.
• W1975774421 hasConcept C178790620 @default.
• W1975774421 hasConcept C179104552 @default.
• W1975774421 hasConcept C18293161 @default.
• W1975774421 hasConcept C185592680 @default.
• W1975774421 hasConcept C19067145 @default.
• W1975774421 hasConcept C192562407 @default.
• W1975774421 hasConcept C2777289219 @default.
• W1975774421 hasConcept C2779227376 @default.
• W1975774421 hasConcept C29563950 @default.
• W1975774421 hasConcept C42360764 @default.
• W1975774421 hasConcept C61048295 @default.
• W1975774421 hasConcept C62960913 @default.
• W1975774421 hasConcept C69544855 @default.
• W1975774421 hasConceptScore W1975774421C111368507 @default.
• W1975774421 hasConceptScore W1975774421C113196181 @default.
• W1975774421 hasConceptScore W1975774421C127313418 @default.
• W1975774421 hasConceptScore W1975774421C127413603 @default.
• W1975774421 hasConceptScore W1975774421C171250308 @default.
• W1975774421 hasConceptScore W1975774421C175708663 @default.
• W1975774421 hasConceptScore W1975774421C178790620 @default.
• W1975774421 hasConceptScore W1975774421C179104552 @default.
• W1975774421 hasConceptScore W1975774421C18293161 @default.
• W1975774421 hasConceptScore W1975774421C185592680 @default.
• W1975774421 hasConceptScore W1975774421C19067145 @default.

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