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• W1976000007 endingPage "66" @default.
• W1976000007 startingPage "59" @default.
• W1976000007 abstract "For special purposes like writing ion implantation or ion mixing in the micrometer- or sub-micrometer range different ion species are needed. Therefore alloy liquid metal ion sources (LMISs) are used. The energy distribution of the ions from an alloy LMIS is one of the determining factors for the performance of a FIB column. Different source materials like Au73Ge27, Au82Si18, Au77Ge14Si9, Co36Nd64, Er69Ni31, and Er70Fe22Ni5Cr3 were investigated with respect to the energy spread of the different ion species as a function of emission current, ion mass and emitter temperature. The alloy LMISs discussed above have been used in the Rossendorf FIB system IMSA especially for writing implantation to fabricate sub-micrometer pattern without any lithographic steps. A Co-FIB was applied for the ion beam synthesis of CoSi2 micro-structures. Additionally, the possibility of varying the current density with the FIB by changing the pixel dwell time was used for radiation damage investigations in Si and SiC at elevated implantation temperatures. Furthermore, a broad spectrum of ions was employed to study the sputtering process depending on temperature, angle of incidence and ion mass on a couple of target materials using the volume-loss method. Especially this technique was used for the fabrication of various kinds of micro-tools." @default.
• W1976000007 created "2016-06-24" @default.
• W1976000007 creator A5087934545 @default.
• W1976000007 date "2005-04-01" @default.
• W1976000007 modified "2023-10-09" @default.
• W1976000007 title "Alloy liquid metal ion sources and their application in mass separated focused ion beams" @default.
• W1976000007 cites W1964731099 @default.
• W1976000007 cites W1965682506 @default.
• W1976000007 cites W1969975214 @default.
• W1976000007 cites W1971424536 @default.
• W1976000007 cites W1971706423 @default.
• W1976000007 cites W1978657229 @default.
• W1976000007 cites W1979083030 @default.
• W1976000007 cites W1985030375 @default.
• W1976000007 cites W1990544967 @default.
• W1976000007 cites W1993180539 @default.
• W1976000007 cites W2003322444 @default.
• W1976000007 cites W2005130598 @default.
• W1976000007 cites W2005772010 @default.
• W1976000007 cites W2007028246 @default.
• W1976000007 cites W2013707992 @default.
• W1976000007 cites W2015915651 @default.
• W1976000007 cites W2016008899 @default.
• W1976000007 cites W2027967576 @default.
• W1976000007 cites W2029363629 @default.
• W1976000007 cites W2030471852 @default.
• W1976000007 cites W2031583489 @default.
• W1976000007 cites W2031715540 @default.
• W1976000007 cites W2032240023 @default.
• W1976000007 cites W2041399629 @default.
• W1976000007 cites W2062303298 @default.
• W1976000007 cites W2062326601 @default.
• W1976000007 cites W2064793347 @default.
• W1976000007 cites W2068620739 @default.
• W1976000007 cites W2068987786 @default.
• W1976000007 cites W2074069406 @default.
• W1976000007 cites W2074428935 @default.
• W1976000007 cites W2074964804 @default.
• W1976000007 cites W2075521785 @default.
• W1976000007 cites W2087741292 @default.
• W1976000007 cites W2132985166 @default.
• W1976000007 cites W2167699112 @default.
• W1976000007 cites W2178719974 @default.
• W1976000007 cites W2321045404 @default.
• W1976000007 cites W4230053467 @default.
• W1976000007 cites W4234135633 @default.
• W1976000007 cites W4367138787 @default.
• W1976000007 doi "https://doi.org/10.1016/j.ultramic.2004.11.020" @default.
• W1976000007 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/15777600" @default.
• W1976000007 hasPublicationYear "2005" @default.
• W1976000007 type Work @default.
• W1976000007 sameAs 1976000007 @default.
• W1976000007 citedByCount "48" @default.
• W1976000007 countsByYear W19760000072012 @default.
• W1976000007 countsByYear W19760000072013 @default.
• W1976000007 countsByYear W19760000072014 @default.
• W1976000007 countsByYear W19760000072015 @default.
• W1976000007 countsByYear W19760000072016 @default.
• W1976000007 countsByYear W19760000072017 @default.
• W1976000007 countsByYear W19760000072019 @default.
• W1976000007 countsByYear W19760000072020 @default.
• W1976000007 crossrefType "journal-article" @default.
• W1976000007 hasAuthorship W1976000007A5087934545 @default.
• W1976000007 hasConcept C107920040 @default.
• W1976000007 hasConcept C113196181 @default.
• W1976000007 hasConcept C120665830 @default.
• W1976000007 hasConcept C121332964 @default.
• W1976000007 hasConcept C136525101 @default.
• W1976000007 hasConcept C142724271 @default.
• W1976000007 hasConcept C145148216 @default.
• W1976000007 hasConcept C159985019 @default.
• W1976000007 hasConcept C161866238 @default.
• W1976000007 hasConcept C171250308 @default.
• W1976000007 hasConcept C171635847 @default.
• W1976000007 hasConcept C178790620 @default.
• W1976000007 hasConcept C185592680 @default.
• W1976000007 hasConcept C188224857 @default.
• W1976000007 hasConcept C19067145 @default.
• W1976000007 hasConcept C192562407 @default.
• W1976000007 hasConcept C204787440 @default.
• W1976000007 hasConcept C22423302 @default.
• W1976000007 hasConcept C2780026712 @default.
• W1976000007 hasConcept C2781048479 @default.
• W1976000007 hasConcept C41823505 @default.
• W1976000007 hasConcept C43617362 @default.
• W1976000007 hasConcept C49040817 @default.
• W1976000007 hasConcept C50774322 @default.
• W1976000007 hasConcept C71924100 @default.
• W1976000007 hasConcept C93106096 @default.
• W1976000007 hasConceptScore W1976000007C107920040 @default.
• W1976000007 hasConceptScore W1976000007C113196181 @default.
• W1976000007 hasConceptScore W1976000007C120665830 @default.
• W1976000007 hasConceptScore W1976000007C121332964 @default.
• W1976000007 hasConceptScore W1976000007C136525101 @default.
• W1976000007 hasConceptScore W1976000007C142724271 @default.
• W1976000007 hasConceptScore W1976000007C145148216 @default.
• W1976000007 hasConceptScore W1976000007C159985019 @default.
• W1976000007 hasConceptScore W1976000007C161866238 @default.

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