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- W1976009083 endingPage "190" @default.
- W1976009083 startingPage "185" @default.
- W1976009083 abstract "Abstract The nanomechanical properties of Pt thin films grown on Si (100) using atomic layer deposition (ALD) were investigated using nanoindentation. Recently, atomic layer deposition (ALD) has successfully demonstrated the capability to deposit ultra-thin films of platinum (Pt). Using (methylcyclopentadienyl) trimethylplatinum (MeCpPtMe3) as chemical platinum precursor and oxygen (O2) as the oxidizing agent, the ALD synthesis of Pt can be achieved with high conformity and excellent film uniformity. The ALD process window for Pt films was experimentally established in the temperature range between 270 °C and 320 °C, where the sheet conductance was constant over that temperature range, indicating stable ALD Pt film growth rate. ALD growth of Pt films exhibits very poor nucleation and adhesion characteristics on bare Si surfaces when the native oxide was removed by 2% HF etch. Pt adhesion improves for thermally oxidized Si wafers and for Si wafers covered with native oxide. Three ALD Pt films deposited at 800, 900, and 1000 ALD deposition cycles were tested for the structural and mechanical properties. Additionally, the sample with 900 ALD deposition cycles was further annealed in forming gas (95% N2 and 5% H2) at 450 °C for 30 min in order to passivate dangling bonds in the grain boundaries of the polycrystalline Pt film. Cross-sectional transmission electron microscopy (TEM), X-ray diffraction (XRD), atomic force microscopy (AFM), and scanning electron microscope (SEM) were employed to characterize the films' surface structure and morphology. Nanoindentation technique was used to evaluate the hardness and modulus of the ALD Pt films of various film thicknesses. The results indicate that the films depict comparable hardness and modulus results; however, the 800 and 1000 ALD deposition cycles films without forming gas annealing experienced significant amount of pileup, whereas the 900 ALD deposition cycles sample annealed in forming gas resulted in a smaller pileup." @default.
- W1976009083 created "2016-06-24" @default.
- W1976009083 creator A5006992199 @default.
- W1976009083 creator A5018887891 @default.
- W1976009083 creator A5031624091 @default.
- W1976009083 creator A5043366889 @default.
- W1976009083 date "2015-03-01" @default.
- W1976009083 modified "2023-09-27" @default.
- W1976009083 title "Nanomechanical properties of platinum thin films synthesized by atomic layer deposition" @default.
- W1976009083 cites W1967749052 @default.
- W1976009083 cites W1972797272 @default.
- W1976009083 cites W1981130398 @default.
- W1976009083 cites W1983182405 @default.
- W1976009083 cites W1991965248 @default.
- W1976009083 cites W2005804193 @default.
- W1976009083 cites W2009106810 @default.
- W1976009083 cites W2027949852 @default.
- W1976009083 cites W2037070285 @default.
- W1976009083 cites W2049302752 @default.
- W1976009083 cites W2051166244 @default.
- W1976009083 cites W2089559557 @default.
- W1976009083 cites W2091755010 @default.
- W1976009083 cites W2110572567 @default.
- W1976009083 cites W2320271995 @default.
- W1976009083 cites W2323581297 @default.
- W1976009083 cites W2333547160 @default.
- W1976009083 doi "https://doi.org/10.1016/j.surfcoat.2015.01.037" @default.
- W1976009083 hasPublicationYear "2015" @default.
- W1976009083 type Work @default.
- W1976009083 sameAs 1976009083 @default.
- W1976009083 citedByCount "6" @default.
- W1976009083 countsByYear W19760090832015 @default.
- W1976009083 countsByYear W19760090832018 @default.
- W1976009083 countsByYear W19760090832019 @default.
- W1976009083 countsByYear W19760090832020 @default.
- W1976009083 crossrefType "journal-article" @default.
- W1976009083 hasAuthorship W1976009083A5006992199 @default.
- W1976009083 hasAuthorship W1976009083A5018887891 @default.
- W1976009083 hasAuthorship W1976009083A5031624091 @default.
- W1976009083 hasAuthorship W1976009083A5043366889 @default.
- W1976009083 hasConcept C127413603 @default.
- W1976009083 hasConcept C151730666 @default.
- W1976009083 hasConcept C161790260 @default.
- W1976009083 hasConcept C171250308 @default.
- W1976009083 hasConcept C178790620 @default.
- W1976009083 hasConcept C185592680 @default.
- W1976009083 hasConcept C19067145 @default.
- W1976009083 hasConcept C192562407 @default.
- W1976009083 hasConcept C2779227376 @default.
- W1976009083 hasConcept C2816523 @default.
- W1976009083 hasConcept C42360764 @default.
- W1976009083 hasConcept C48123060 @default.
- W1976009083 hasConcept C518104683 @default.
- W1976009083 hasConcept C62960913 @default.
- W1976009083 hasConcept C64297162 @default.
- W1976009083 hasConcept C69544855 @default.
- W1976009083 hasConcept C86803240 @default.
- W1976009083 hasConceptScore W1976009083C127413603 @default.
- W1976009083 hasConceptScore W1976009083C151730666 @default.
- W1976009083 hasConceptScore W1976009083C161790260 @default.
- W1976009083 hasConceptScore W1976009083C171250308 @default.
- W1976009083 hasConceptScore W1976009083C178790620 @default.
- W1976009083 hasConceptScore W1976009083C185592680 @default.
- W1976009083 hasConceptScore W1976009083C19067145 @default.
- W1976009083 hasConceptScore W1976009083C192562407 @default.
- W1976009083 hasConceptScore W1976009083C2779227376 @default.
- W1976009083 hasConceptScore W1976009083C2816523 @default.
- W1976009083 hasConceptScore W1976009083C42360764 @default.
- W1976009083 hasConceptScore W1976009083C48123060 @default.
- W1976009083 hasConceptScore W1976009083C518104683 @default.
- W1976009083 hasConceptScore W1976009083C62960913 @default.
- W1976009083 hasConceptScore W1976009083C64297162 @default.
- W1976009083 hasConceptScore W1976009083C69544855 @default.
- W1976009083 hasConceptScore W1976009083C86803240 @default.
- W1976009083 hasLocation W19760090831 @default.
- W1976009083 hasOpenAccess W1976009083 @default.
- W1976009083 hasPrimaryLocation W19760090831 @default.
- W1976009083 hasRelatedWork W1857408817 @default.
- W1976009083 hasRelatedWork W1964786252 @default.
- W1976009083 hasRelatedWork W1998534931 @default.
- W1976009083 hasRelatedWork W2018043529 @default.
- W1976009083 hasRelatedWork W2160926121 @default.
- W1976009083 hasRelatedWork W2271217798 @default.
- W1976009083 hasRelatedWork W2562975367 @default.
- W1976009083 hasRelatedWork W2953419883 @default.
- W1976009083 hasRelatedWork W3010468778 @default.
- W1976009083 hasRelatedWork W3081152880 @default.
- W1976009083 hasVolume "265" @default.
- W1976009083 isParatext "false" @default.
- W1976009083 isRetracted "false" @default.
- W1976009083 magId "1976009083" @default.
- W1976009083 workType "article" @default.