Matches in SemOpenAlex for { <https://semopenalex.org/work/W1976203673> ?p ?o ?g. }
- W1976203673 endingPage "32" @default.
- W1976203673 startingPage "28" @default.
- W1976203673 abstract "Optical emission spectroscopy (OES) has been used to investigate the generation of active species in H2/CH4 and H2/Ar/CH4 AC abnormal glow discharge plasmas during chemical vapor deposition of polycrystalline diamond. The vertical, spatially resolved measurements illustrate that the concentration of atomic hydrogen decreases rapidly with distance from the center of the plasma column. The addition of argon to the gas mixture leads to a drop in the electronic temperature and an increase in gas temperature but causes decreased atomic hydrogen concentration and diamond film growth rate due to the reduction in molecular hydrogen concentration. The emissions were monitored as functions of such process parameters as discharge current, gas flow rate, operating pressure and argon content. Obtained relations identified by OES were found to be in good agreement with experimental diamond growth measurements." @default.
- W1976203673 created "2016-06-24" @default.
- W1976203673 creator A5011420642 @default.
- W1976203673 creator A5074349479 @default.
- W1976203673 date "2014-05-01" @default.
- W1976203673 modified "2023-09-26" @default.
- W1976203673 title "Application of optical emission spectroscopy for the determination of optimal CVD diamond growth parameters in abnormal glow discharge plasma" @default.
- W1976203673 cites W1980038009 @default.
- W1976203673 cites W1985969730 @default.
- W1976203673 cites W1987432984 @default.
- W1976203673 cites W1993083910 @default.
- W1976203673 cites W1995541411 @default.
- W1976203673 cites W1999357174 @default.
- W1976203673 cites W2007460944 @default.
- W1976203673 cites W2009088332 @default.
- W1976203673 cites W2013391102 @default.
- W1976203673 cites W2013692760 @default.
- W1976203673 cites W2017205435 @default.
- W1976203673 cites W2017481256 @default.
- W1976203673 cites W2022028647 @default.
- W1976203673 cites W2022634502 @default.
- W1976203673 cites W2027203808 @default.
- W1976203673 cites W2029499202 @default.
- W1976203673 cites W2029675603 @default.
- W1976203673 cites W2036105257 @default.
- W1976203673 cites W2036267434 @default.
- W1976203673 cites W2036978903 @default.
- W1976203673 cites W2063303755 @default.
- W1976203673 cites W2068119646 @default.
- W1976203673 cites W2075524246 @default.
- W1976203673 cites W2079423693 @default.
- W1976203673 cites W2086275647 @default.
- W1976203673 cites W2090739622 @default.
- W1976203673 cites W2156625164 @default.
- W1976203673 cites W2473504753 @default.
- W1976203673 cites W2949627870 @default.
- W1976203673 doi "https://doi.org/10.1016/j.vacuum.2013.12.001" @default.
- W1976203673 hasPublicationYear "2014" @default.
- W1976203673 type Work @default.
- W1976203673 sameAs 1976203673 @default.
- W1976203673 citedByCount "25" @default.
- W1976203673 countsByYear W19762036732014 @default.
- W1976203673 countsByYear W19762036732015 @default.
- W1976203673 countsByYear W19762036732016 @default.
- W1976203673 countsByYear W19762036732017 @default.
- W1976203673 countsByYear W19762036732018 @default.
- W1976203673 countsByYear W19762036732019 @default.
- W1976203673 countsByYear W19762036732020 @default.
- W1976203673 countsByYear W19762036732021 @default.
- W1976203673 countsByYear W19762036732022 @default.
- W1976203673 countsByYear W19762036732023 @default.
- W1976203673 crossrefType "journal-article" @default.
- W1976203673 hasAuthorship W1976203673A5011420642 @default.
- W1976203673 hasAuthorship W1976203673A5074349479 @default.
- W1976203673 hasConcept C113196181 @default.
- W1976203673 hasConcept C121332964 @default.
- W1976203673 hasConcept C172120300 @default.
- W1976203673 hasConcept C178790620 @default.
- W1976203673 hasConcept C185592680 @default.
- W1976203673 hasConcept C192562407 @default.
- W1976203673 hasConcept C2776595061 @default.
- W1976203673 hasConcept C2776921476 @default.
- W1976203673 hasConcept C2781345722 @default.
- W1976203673 hasConcept C41008148 @default.
- W1976203673 hasConcept C43617362 @default.
- W1976203673 hasConcept C49040817 @default.
- W1976203673 hasConcept C512968161 @default.
- W1976203673 hasConcept C547737533 @default.
- W1976203673 hasConcept C57410435 @default.
- W1976203673 hasConcept C62520636 @default.
- W1976203673 hasConcept C76155785 @default.
- W1976203673 hasConcept C82706917 @default.
- W1976203673 hasConceptScore W1976203673C113196181 @default.
- W1976203673 hasConceptScore W1976203673C121332964 @default.
- W1976203673 hasConceptScore W1976203673C172120300 @default.
- W1976203673 hasConceptScore W1976203673C178790620 @default.
- W1976203673 hasConceptScore W1976203673C185592680 @default.
- W1976203673 hasConceptScore W1976203673C192562407 @default.
- W1976203673 hasConceptScore W1976203673C2776595061 @default.
- W1976203673 hasConceptScore W1976203673C2776921476 @default.
- W1976203673 hasConceptScore W1976203673C2781345722 @default.
- W1976203673 hasConceptScore W1976203673C41008148 @default.
- W1976203673 hasConceptScore W1976203673C43617362 @default.
- W1976203673 hasConceptScore W1976203673C49040817 @default.
- W1976203673 hasConceptScore W1976203673C512968161 @default.
- W1976203673 hasConceptScore W1976203673C547737533 @default.
- W1976203673 hasConceptScore W1976203673C57410435 @default.
- W1976203673 hasConceptScore W1976203673C62520636 @default.
- W1976203673 hasConceptScore W1976203673C76155785 @default.
- W1976203673 hasConceptScore W1976203673C82706917 @default.
- W1976203673 hasLocation W19762036731 @default.
- W1976203673 hasOpenAccess W1976203673 @default.
- W1976203673 hasPrimaryLocation W19762036731 @default.
- W1976203673 hasRelatedWork W1954586915 @default.
- W1976203673 hasRelatedWork W1968453978 @default.
- W1976203673 hasRelatedWork W2067743307 @default.
- W1976203673 hasRelatedWork W2080043420 @default.
- W1976203673 hasRelatedWork W2095033126 @default.