Matches in SemOpenAlex for { <https://semopenalex.org/work/W1976422510> ?p ?o ?g. }
Showing items 1 to 86 of
86
with 100 items per page.
- W1976422510 endingPage "59" @default.
- W1976422510 startingPage "56" @default.
- W1976422510 abstract "Systematic low-high two-step and high-low-high three-step annealing studies were conducted to investigate the microdefects generated in Czochralski silicon wafers. It was found that cluster precipitates entangled with dislocations are annihilated during extended low temperature anneal. A model involving the recombination of vacancies with interstitials is proposed to explain this phenomenon." @default.
- W1976422510 created "2016-06-24" @default.
- W1976422510 creator A5039311239 @default.
- W1976422510 creator A5040634427 @default.
- W1976422510 creator A5075206453 @default.
- W1976422510 creator A5084835359 @default.
- W1976422510 date "1998-01-01" @default.
- W1976422510 modified "2023-09-24" @default.
- W1976422510 title "The variation of microstructure in Czochralski silicon induced by low-high two step anneal" @default.
- W1976422510 cites W1973310127 @default.
- W1976422510 cites W1992971937 @default.
- W1976422510 cites W2032347749 @default.
- W1976422510 cites W2049840987 @default.
- W1976422510 cites W2057873429 @default.
- W1976422510 cites W2058654823 @default.
- W1976422510 cites W2068135708 @default.
- W1976422510 cites W2078140681 @default.
- W1976422510 cites W2079659865 @default.
- W1976422510 cites W2081023930 @default.
- W1976422510 cites W2084140993 @default.
- W1976422510 cites W2085093267 @default.
- W1976422510 cites W2129130421 @default.
- W1976422510 cites W2166009285 @default.
- W1976422510 doi "https://doi.org/10.1063/1.366701" @default.
- W1976422510 hasPublicationYear "1998" @default.
- W1976422510 type Work @default.
- W1976422510 sameAs 1976422510 @default.
- W1976422510 citedByCount "4" @default.
- W1976422510 crossrefType "journal-article" @default.
- W1976422510 hasAuthorship W1976422510A5039311239 @default.
- W1976422510 hasAuthorship W1976422510A5040634427 @default.
- W1976422510 hasAuthorship W1976422510A5075206453 @default.
- W1976422510 hasAuthorship W1976422510A5084835359 @default.
- W1976422510 hasConcept C104317684 @default.
- W1976422510 hasConcept C156695909 @default.
- W1976422510 hasConcept C159467904 @default.
- W1976422510 hasConcept C160671074 @default.
- W1976422510 hasConcept C164866538 @default.
- W1976422510 hasConcept C185592680 @default.
- W1976422510 hasConcept C191897082 @default.
- W1976422510 hasConcept C192562407 @default.
- W1976422510 hasConcept C199360897 @default.
- W1976422510 hasConcept C2777855556 @default.
- W1976422510 hasConcept C41008148 @default.
- W1976422510 hasConcept C49040817 @default.
- W1976422510 hasConcept C544956773 @default.
- W1976422510 hasConcept C55493867 @default.
- W1976422510 hasConcept C8010536 @default.
- W1976422510 hasConcept C87976508 @default.
- W1976422510 hasConceptScore W1976422510C104317684 @default.
- W1976422510 hasConceptScore W1976422510C156695909 @default.
- W1976422510 hasConceptScore W1976422510C159467904 @default.
- W1976422510 hasConceptScore W1976422510C160671074 @default.
- W1976422510 hasConceptScore W1976422510C164866538 @default.
- W1976422510 hasConceptScore W1976422510C185592680 @default.
- W1976422510 hasConceptScore W1976422510C191897082 @default.
- W1976422510 hasConceptScore W1976422510C192562407 @default.
- W1976422510 hasConceptScore W1976422510C199360897 @default.
- W1976422510 hasConceptScore W1976422510C2777855556 @default.
- W1976422510 hasConceptScore W1976422510C41008148 @default.
- W1976422510 hasConceptScore W1976422510C49040817 @default.
- W1976422510 hasConceptScore W1976422510C544956773 @default.
- W1976422510 hasConceptScore W1976422510C55493867 @default.
- W1976422510 hasConceptScore W1976422510C8010536 @default.
- W1976422510 hasConceptScore W1976422510C87976508 @default.
- W1976422510 hasIssue "1" @default.
- W1976422510 hasLocation W19764225101 @default.
- W1976422510 hasOpenAccess W1976422510 @default.
- W1976422510 hasPrimaryLocation W19764225101 @default.
- W1976422510 hasRelatedWork W1921331855 @default.
- W1976422510 hasRelatedWork W1964478537 @default.
- W1976422510 hasRelatedWork W2002504916 @default.
- W1976422510 hasRelatedWork W2006260406 @default.
- W1976422510 hasRelatedWork W2026213874 @default.
- W1976422510 hasRelatedWork W2028024115 @default.
- W1976422510 hasRelatedWork W2214936313 @default.
- W1976422510 hasRelatedWork W2347531304 @default.
- W1976422510 hasRelatedWork W242636638 @default.
- W1976422510 hasRelatedWork W3140606426 @default.
- W1976422510 hasVolume "83" @default.
- W1976422510 isParatext "false" @default.
- W1976422510 isRetracted "false" @default.
- W1976422510 magId "1976422510" @default.
- W1976422510 workType "article" @default.