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- W1976456819 abstract "The strain in SiGeC heteroepitaxial films grown on Si(001) substrates by chemical vapor deposition is quantified using ion channeling. Rutherford backscattering spectrometry was used to quantify the Ge concentration as well as the film thickness, nuclear resonance elastic ion scattering was used to quantify the C concentration, and ion channeling was utilized to measure film quality and C substitutionality. Channeling angular scans across an off-normal major axis were used to quantify the strain. The results confirm that addition of C compensates for the strain introduced by Ge." @default.
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- W1976456819 date "1996-03-01" @default.
- W1976456819 modified "2023-09-27" @default.
- W1976456819 title "Strain measurements of SiGeC heteroepitaxial layers on Si(001) using ion beam analysis" @default.
- W1976456819 doi "https://doi.org/10.1116/1.580103" @default.
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