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Matches in SemOpenAlex for { <https://semopenalex.org/work/W1976540504> ?p ?o ?g. }

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• W1976540504 abstract "Stainless steel (SUS-304) was coated with titanium nitride (TiN) using a ion beam assisted deposition (IBAD) technique. The deposited TiN films were polycrystals oriented in the 〈111〉 〈200〉 and 〈220〉 directions. The thickness of the deposited TiN films was measured using Rutherford backscattering spectrometry with He ions. The thickness of the films decreased with increasing N ion energy, and they were not dependent on substrate temperature but significantly decreased with substrate temperature above a specific temperature for SUS-304 because the sticking coefficient of Ti to SUS-304 was less than unity." @default.
• W1976540504 created "2016-06-24" @default.
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• W1976540504 date "2000-05-01" @default.
• W1976540504 modified "2023-10-14" @default.
• W1976540504 title "Dependence of film thickness on nitrogen ion energy and substrate temperature for titanium nitride films on stainless steel using an ion beam assisted deposition technique" @default.
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• W1976540504 doi "https://doi.org/10.1016/s0168-583x(99)01058-7" @default.
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