Matches in SemOpenAlex for { <https://semopenalex.org/work/W1976559143> ?p ?o ?g. }
- W1976559143 abstract "AlGaN/GaN based metal–insulator–semiconductor high-electron-mobility transistors (HEMTs) using a plasma enhanced atomic layer deposited 10 nm AlN as the gate insulator and passivation layer were demonstrated. A refractive index of 1.92 for the deposited AlN was measured using an ellipsometer, which was slightly lower than that of bulk AlN. The deviation of the refractive index from the ideal value was caused by AlN surface oxidation, and this was confirmed by X-ray photoelectron spectroscopy and Auger depth profiling analyses. The HEMT drain current was modulated with gate voltages ranging from −3 to +4 V. The HEMT exhibited an on-off ratio of 3.3 × 108 due to the low gate leakage current and a maximum saturation drain current of 600 mA/mm. Beside reducing the gate leakage current, the effectiveness of the HEMT passivation was confirmed by gate pulse measurements, which showed only a 7% decrease of the drain current." @default.
- W1976559143 created "2016-06-24" @default.
- W1976559143 creator A5001602795 @default.
- W1976559143 creator A5014128046 @default.
- W1976559143 creator A5018152737 @default.
- W1976559143 creator A5020156436 @default.
- W1976559143 creator A5020967437 @default.
- W1976559143 creator A5037920466 @default.
- W1976559143 creator A5048005381 @default.
- W1976559143 creator A5053544048 @default.
- W1976559143 creator A5054736350 @default.
- W1976559143 creator A5077519862 @default.
- W1976559143 creator A5085381025 @default.
- W1976559143 date "2013-07-30" @default.
- W1976559143 modified "2023-10-18" @default.
- W1976559143 title "GaN metal–insulator–semiconductor high-electron-mobility transistor with plasma enhanced atomic layer deposited AlN as gate dielectric and passivation" @default.
- W1976559143 cites W1497509279 @default.
- W1976559143 cites W1669917242 @default.
- W1976559143 cites W1983483720 @default.
- W1976559143 cites W1987156766 @default.
- W1976559143 cites W1994545426 @default.
- W1976559143 cites W2006899770 @default.
- W1976559143 cites W2021554946 @default.
- W1976559143 cites W2029354491 @default.
- W1976559143 cites W2030089482 @default.
- W1976559143 cites W2039859464 @default.
- W1976559143 cites W2042032924 @default.
- W1976559143 cites W2048614207 @default.
- W1976559143 cites W2049021971 @default.
- W1976559143 cites W2057591116 @default.
- W1976559143 cites W2060024903 @default.
- W1976559143 cites W2062386242 @default.
- W1976559143 cites W2065097001 @default.
- W1976559143 cites W2065820983 @default.
- W1976559143 cites W2067407700 @default.
- W1976559143 cites W2074225081 @default.
- W1976559143 cites W2087949623 @default.
- W1976559143 cites W2103119574 @default.
- W1976559143 cites W2135780270 @default.
- W1976559143 cites W2162871852 @default.
- W1976559143 cites W2198238514 @default.
- W1976559143 cites W2259431542 @default.
- W1976559143 doi "https://doi.org/10.1116/1.4816477" @default.
- W1976559143 hasPublicationYear "2013" @default.
- W1976559143 type Work @default.
- W1976559143 sameAs 1976559143 @default.
- W1976559143 citedByCount "6" @default.
- W1976559143 countsByYear W19765591432014 @default.
- W1976559143 countsByYear W19765591432015 @default.
- W1976559143 countsByYear W19765591432017 @default.
- W1976559143 countsByYear W19765591432018 @default.
- W1976559143 countsByYear W19765591432020 @default.
- W1976559143 crossrefType "journal-article" @default.
- W1976559143 hasAuthorship W1976559143A5001602795 @default.
- W1976559143 hasAuthorship W1976559143A5014128046 @default.
- W1976559143 hasAuthorship W1976559143A5018152737 @default.
- W1976559143 hasAuthorship W1976559143A5020156436 @default.
- W1976559143 hasAuthorship W1976559143A5020967437 @default.
- W1976559143 hasAuthorship W1976559143A5037920466 @default.
- W1976559143 hasAuthorship W1976559143A5048005381 @default.
- W1976559143 hasAuthorship W1976559143A5053544048 @default.
- W1976559143 hasAuthorship W1976559143A5054736350 @default.
- W1976559143 hasAuthorship W1976559143A5077519862 @default.
- W1976559143 hasAuthorship W1976559143A5085381025 @default.
- W1976559143 hasConcept C106782819 @default.
- W1976559143 hasConcept C108225325 @default.
- W1976559143 hasConcept C113196181 @default.
- W1976559143 hasConcept C119599485 @default.
- W1976559143 hasConcept C121332964 @default.
- W1976559143 hasConcept C127413603 @default.
- W1976559143 hasConcept C133386390 @default.
- W1976559143 hasConcept C139719470 @default.
- W1976559143 hasConcept C155891486 @default.
- W1976559143 hasConcept C162057924 @default.
- W1976559143 hasConcept C162324750 @default.
- W1976559143 hasConcept C165801399 @default.
- W1976559143 hasConcept C166972891 @default.
- W1976559143 hasConcept C171250308 @default.
- W1976559143 hasConcept C172385210 @default.
- W1976559143 hasConcept C175708663 @default.
- W1976559143 hasConcept C18293161 @default.
- W1976559143 hasConcept C185544564 @default.
- W1976559143 hasConcept C185592680 @default.
- W1976559143 hasConcept C19067145 @default.
- W1976559143 hasConcept C192562407 @default.
- W1976559143 hasConcept C25442681 @default.
- W1976559143 hasConcept C2777042071 @default.
- W1976559143 hasConcept C2779227376 @default.
- W1976559143 hasConcept C33574316 @default.
- W1976559143 hasConcept C43617362 @default.
- W1976559143 hasConcept C46141821 @default.
- W1976559143 hasConcept C49040817 @default.
- W1976559143 hasConcept C69544855 @default.
- W1976559143 hasConceptScore W1976559143C106782819 @default.
- W1976559143 hasConceptScore W1976559143C108225325 @default.
- W1976559143 hasConceptScore W1976559143C113196181 @default.
- W1976559143 hasConceptScore W1976559143C119599485 @default.
- W1976559143 hasConceptScore W1976559143C121332964 @default.
- W1976559143 hasConceptScore W1976559143C127413603 @default.
- W1976559143 hasConceptScore W1976559143C133386390 @default.