Matches in SemOpenAlex for { <https://semopenalex.org/work/W1976573116> ?p ?o ?g. }
Showing items 1 to 86 of
86
with 100 items per page.
- W1976573116 abstract "The dielectric strength of thin (16 nm) thermal oxide grown using thin amorphous Si is investigated in terms of preoxidation annealing, oxidation, and postoxidation annealing temperatures. Even when the gate area is large (25 mm 2 ), many metal oxide semiconductor capacitors provided histograms of oxide dielectric strength displaying narrow distributions. Preoxidation annealing at temperatures above 950 o C drastically reduces the dielectric breakdown to nearly 0 MV/cm. The dielectric strength increases or decreases according to the postoxidation annealing temperature, suggesting that this change in dielectric strength is associated with a reversible mechanism" @default.
- W1976573116 created "2016-06-24" @default.
- W1976573116 creator A5049614823 @default.
- W1976573116 creator A5089125718 @default.
- W1976573116 date "1993-11-01" @default.
- W1976573116 modified "2023-09-25" @default.
- W1976573116 title "Dielectric Strength of Thin Oxide Grown Thermally Using Thin Amorphous Silicon" @default.
- W1976573116 doi "https://doi.org/10.1149/1.2221012" @default.
- W1976573116 hasPublicationYear "1993" @default.
- W1976573116 type Work @default.
- W1976573116 sameAs 1976573116 @default.
- W1976573116 citedByCount "3" @default.
- W1976573116 crossrefType "journal-article" @default.
- W1976573116 hasAuthorship W1976573116A5049614823 @default.
- W1976573116 hasAuthorship W1976573116A5089125718 @default.
- W1976573116 hasConcept C119599485 @default.
- W1976573116 hasConcept C127413603 @default.
- W1976573116 hasConcept C133386390 @default.
- W1976573116 hasConcept C159985019 @default.
- W1976573116 hasConcept C165801399 @default.
- W1976573116 hasConcept C166972891 @default.
- W1976573116 hasConcept C171250308 @default.
- W1976573116 hasConcept C172385210 @default.
- W1976573116 hasConcept C185592680 @default.
- W1976573116 hasConcept C19067145 @default.
- W1976573116 hasConcept C191897082 @default.
- W1976573116 hasConcept C192562407 @default.
- W1976573116 hasConcept C2776390347 @default.
- W1976573116 hasConcept C2777855556 @default.
- W1976573116 hasConcept C2779667780 @default.
- W1976573116 hasConcept C2779851234 @default.
- W1976573116 hasConcept C49040817 @default.
- W1976573116 hasConcept C52192207 @default.
- W1976573116 hasConcept C544956773 @default.
- W1976573116 hasConcept C56052488 @default.
- W1976573116 hasConcept C70401718 @default.
- W1976573116 hasConcept C8010536 @default.
- W1976573116 hasConceptScore W1976573116C119599485 @default.
- W1976573116 hasConceptScore W1976573116C127413603 @default.
- W1976573116 hasConceptScore W1976573116C133386390 @default.
- W1976573116 hasConceptScore W1976573116C159985019 @default.
- W1976573116 hasConceptScore W1976573116C165801399 @default.
- W1976573116 hasConceptScore W1976573116C166972891 @default.
- W1976573116 hasConceptScore W1976573116C171250308 @default.
- W1976573116 hasConceptScore W1976573116C172385210 @default.
- W1976573116 hasConceptScore W1976573116C185592680 @default.
- W1976573116 hasConceptScore W1976573116C19067145 @default.
- W1976573116 hasConceptScore W1976573116C191897082 @default.
- W1976573116 hasConceptScore W1976573116C192562407 @default.
- W1976573116 hasConceptScore W1976573116C2776390347 @default.
- W1976573116 hasConceptScore W1976573116C2777855556 @default.
- W1976573116 hasConceptScore W1976573116C2779667780 @default.
- W1976573116 hasConceptScore W1976573116C2779851234 @default.
- W1976573116 hasConceptScore W1976573116C49040817 @default.
- W1976573116 hasConceptScore W1976573116C52192207 @default.
- W1976573116 hasConceptScore W1976573116C544956773 @default.
- W1976573116 hasConceptScore W1976573116C56052488 @default.
- W1976573116 hasConceptScore W1976573116C70401718 @default.
- W1976573116 hasConceptScore W1976573116C8010536 @default.
- W1976573116 hasLocation W19765731161 @default.
- W1976573116 hasOpenAccess W1976573116 @default.
- W1976573116 hasPrimaryLocation W19765731161 @default.
- W1976573116 hasRelatedWork W1567230244 @default.
- W1976573116 hasRelatedWork W1978588116 @default.
- W1976573116 hasRelatedWork W1978729049 @default.
- W1976573116 hasRelatedWork W1988330054 @default.
- W1976573116 hasRelatedWork W2000945616 @default.
- W1976573116 hasRelatedWork W2006578738 @default.
- W1976573116 hasRelatedWork W2015934707 @default.
- W1976573116 hasRelatedWork W2030266004 @default.
- W1976573116 hasRelatedWork W2033535326 @default.
- W1976573116 hasRelatedWork W2047562952 @default.
- W1976573116 hasRelatedWork W2049120352 @default.
- W1976573116 hasRelatedWork W2073540967 @default.
- W1976573116 hasRelatedWork W2078905465 @default.
- W1976573116 hasRelatedWork W2087577656 @default.
- W1976573116 hasRelatedWork W2090219598 @default.
- W1976573116 hasRelatedWork W2142130484 @default.
- W1976573116 hasRelatedWork W2344595745 @default.
- W1976573116 hasRelatedWork W2591047354 @default.
- W1976573116 hasRelatedWork W3168237256 @default.
- W1976573116 hasRelatedWork W2056699262 @default.
- W1976573116 isParatext "false" @default.
- W1976573116 isRetracted "false" @default.
- W1976573116 magId "1976573116" @default.
- W1976573116 workType "article" @default.