FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W1976584309> ?p ?o ?g. }

• W1976584309 endingPage "237" @default.
• W1976584309 startingPage "233" @default.
• W1976584309 abstract "Abstract We fabricated electrolyte-insulator-semiconductor (EIS) devices using a solution process and measured the sensing properties of EISdevices according to the thicknesses of sensing membrane. For high pH sensitivity and better stability properties, we used SiO 2 /HfO x (OH) layer as a sensing membrane. In this work, HfO x sensing membranes were deposited on 5 nm thick SiO 2 buffer layer by spin coaterwith thicknesses of 15, 31, 42, 55 nm, respectively. As a result, we founded that the thickness of HfO x sensing membrane affects tosensitivity and chemical stability of EIS device. Especially, the EIS device with 42 nm thick HfO x membrane showed superior sensingability in terms of pH-sensitivity, linearity, hysteresis voltage and drift rate characteristics than the other devices. In conclusion, weconfirmed that it is possible to improve the sensing ability and the chemical stability properties using optimized thickness of sensingmembrane and proper annealing process. Keywords : pH sensor, EIS, hfO" @default.
• W1976584309 created "2016-06-24" @default.
• W1976584309 creator A5026616959 @default.
• W1976584309 creator A5047744517 @default.
• W1976584309 date "2013-05-31" @default.
• W1976584309 modified "2023-09-24" @default.
• W1976584309 title "Thickness Dependence of Solution Deposited HfOxSensing Membrane for Electrolyte-Insulator-Semiconductor (EIS) Structures" @default.
• W1976584309 cites W1678350171 @default.
• W1976584309 cites W1967452840 @default.
• W1976584309 cites W1968936992 @default.
• W1976584309 cites W1988107871 @default.
• W1976584309 cites W1988905389 @default.
• W1976584309 cites W2003122087 @default.
• W1976584309 cites W2027499714 @default.
• W1976584309 cites W2049474702 @default.
• W1976584309 cites W2052663999 @default.
• W1976584309 cites W2059807262 @default.
• W1976584309 cites W2065815214 @default.
• W1976584309 cites W2069782641 @default.
• W1976584309 cites W2084293881 @default.
• W1976584309 cites W2089241994 @default.
• W1976584309 cites W2092987851 @default.
• W1976584309 cites W2171095529 @default.
• W1976584309 doi "https://doi.org/10.5369/jsst.2013.22.3.233" @default.
• W1976584309 hasPublicationYear "2013" @default.
• W1976584309 type Work @default.
• W1976584309 sameAs 1976584309 @default.
• W1976584309 citedByCount "0" @default.
• W1976584309 crossrefType "journal-article" @default.
• W1976584309 hasAuthorship W1976584309A5026616959 @default.
• W1976584309 hasAuthorship W1976584309A5047744517 @default.
• W1976584309 hasBestOaLocation W19765843091 @default.
• W1976584309 hasConcept C108225325 @default.
• W1976584309 hasConcept C113196181 @default.
• W1976584309 hasConcept C121332964 @default.
• W1976584309 hasConcept C123299182 @default.
• W1976584309 hasConcept C127413603 @default.
• W1976584309 hasConcept C147789679 @default.
• W1976584309 hasConcept C159985019 @default.
• W1976584309 hasConcept C17525397 @default.
• W1976584309 hasConcept C185592680 @default.
• W1976584309 hasConcept C186399102 @default.
• W1976584309 hasConcept C192562407 @default.
• W1976584309 hasConcept C212702 @default.
• W1976584309 hasConcept C24326235 @default.
• W1976584309 hasConcept C2777855556 @default.
• W1976584309 hasConcept C41625074 @default.
• W1976584309 hasConcept C42360764 @default.
• W1976584309 hasConcept C43617362 @default.
• W1976584309 hasConcept C49040817 @default.
• W1976584309 hasConcept C55493867 @default.
• W1976584309 hasConcept C62520636 @default.
• W1976584309 hasConcept C68801617 @default.
• W1976584309 hasConcept C77170095 @default.
• W1976584309 hasConceptScore W1976584309C108225325 @default.
• W1976584309 hasConceptScore W1976584309C113196181 @default.
• W1976584309 hasConceptScore W1976584309C121332964 @default.
• W1976584309 hasConceptScore W1976584309C123299182 @default.
• W1976584309 hasConceptScore W1976584309C127413603 @default.
• W1976584309 hasConceptScore W1976584309C147789679 @default.
• W1976584309 hasConceptScore W1976584309C159985019 @default.
• W1976584309 hasConceptScore W1976584309C17525397 @default.
• W1976584309 hasConceptScore W1976584309C185592680 @default.
• W1976584309 hasConceptScore W1976584309C186399102 @default.
• W1976584309 hasConceptScore W1976584309C192562407 @default.
• W1976584309 hasConceptScore W1976584309C212702 @default.
• W1976584309 hasConceptScore W1976584309C24326235 @default.
• W1976584309 hasConceptScore W1976584309C2777855556 @default.
• W1976584309 hasConceptScore W1976584309C41625074 @default.
• W1976584309 hasConceptScore W1976584309C42360764 @default.
• W1976584309 hasConceptScore W1976584309C43617362 @default.
• W1976584309 hasConceptScore W1976584309C49040817 @default.
• W1976584309 hasConceptScore W1976584309C55493867 @default.
• W1976584309 hasConceptScore W1976584309C62520636 @default.
• W1976584309 hasConceptScore W1976584309C68801617 @default.
• W1976584309 hasConceptScore W1976584309C77170095 @default.
• W1976584309 hasIssue "3" @default.
• W1976584309 hasLocation W19765843091 @default.
• W1976584309 hasOpenAccess W1976584309 @default.
• W1976584309 hasPrimaryLocation W19765843091 @default.
• W1976584309 hasRelatedWork W1624821964 @default.
• W1976584309 hasRelatedWork W1968763216 @default.
• W1976584309 hasRelatedWork W1976937818 @default.
• W1976584309 hasRelatedWork W2005838558 @default.
• W1976584309 hasRelatedWork W2009256523 @default.
• W1976584309 hasRelatedWork W2024062226 @default.
• W1976584309 hasRelatedWork W2024529237 @default.
• W1976584309 hasRelatedWork W2039750617 @default.
• W1976584309 hasRelatedWork W2042613250 @default.
• W1976584309 hasRelatedWork W2044947036 @default.
• W1976584309 hasRelatedWork W2083075236 @default.
• W1976584309 hasRelatedWork W2085629432 @default.
• W1976584309 hasRelatedWork W2092545706 @default.
• W1976584309 hasRelatedWork W2154546801 @default.
• W1976584309 hasRelatedWork W2156915912 @default.
• W1976584309 hasRelatedWork W2200574982 @default.
• W1976584309 hasRelatedWork W2288772717 @default.
• W1976584309 hasRelatedWork W2486866707 @default.

• next