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- W1976638643 abstract "Experimental and analytical studies on oblique ion implantation into a Si trench sidewall are discussed. The observation that implanted ions at small incident angle are reflected at the trench sidewall cannot be explained by the conventional Gaussian distribution model. A simple analytical model for oblique ion reflection, considering the Rutherford scattering collision between implanted ions and the Si nucleus, is introduced. As the ion incident angle becomes smaller than 10 degrees , more and more ions are reflected at the trench sidewall. In addition, the reflection index of arsenic ions is larger than that of phosphorus ions.< <ETX xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>></ETX>" @default.
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- W1976638643 date "1988-01-01" @default.
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- W1976638643 title "Analytical model for oblique ion reflection at the Si surface" @default.
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- W1976638643 doi "https://doi.org/10.1109/16.8808" @default.
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