Matches in SemOpenAlex for { <https://semopenalex.org/work/W1976751553> ?p ?o ?g. }
- W1976751553 endingPage "6927" @default.
- W1976751553 startingPage "6923" @default.
- W1976751553 abstract "Hexagonal SiC thin films have been deposited using radio frequency reactive magnetron sputtering technique by varying the substrate temperature and other deposition conditions. Prior to deposition surface modification of the substrate Si(1 0 0) played an important role in deposition of the hexagonal SiC structure. The effect of substrate temperature during deposition on structure, composition and surface morphology of the SiC films has been analyzed using atomic force microscopy, Fourier transform infrared spectroscopy and spectroscopic ellipsometry. X-ray diffraction in conventional θ–2θ mode and omega scan mode revealed that the deposited films were crystalline having 8H-SiC structure and crystallinity improved with increase of deposition temperature. The bonding order and Si–C composition within the films showed improvement with the increase of deposition temperature. The surface of thin films grew in the shape of globes and columns depending upon deposition temperature. The optical properties also showed improvement with increase of deposition temperature and the results obtained by ellipsometry reinforced the results of other techniques." @default.
- W1976751553 created "2016-06-24" @default.
- W1976751553 creator A5033087785 @default.
- W1976751553 creator A5038309879 @default.
- W1976751553 creator A5038525585 @default.
- W1976751553 creator A5065478955 @default.
- W1976751553 date "2011-05-01" @default.
- W1976751553 modified "2023-10-18" @default.
- W1976751553 title "Synthesis and characterization of porous crystalline SiC thin films prepared by radio frequency reactive magnetron sputtering technique" @default.
- W1976751553 cites W1579431571 @default.
- W1976751553 cites W1969503526 @default.
- W1976751553 cites W1987981829 @default.
- W1976751553 cites W1990698049 @default.
- W1976751553 cites W2008924171 @default.
- W1976751553 cites W2016977268 @default.
- W1976751553 cites W2031650915 @default.
- W1976751553 cites W2034071859 @default.
- W1976751553 cites W2066644507 @default.
- W1976751553 cites W2085382408 @default.
- W1976751553 cites W2154810768 @default.
- W1976751553 cites W2164660193 @default.
- W1976751553 cites W2167313421 @default.
- W1976751553 cites W236672180 @default.
- W1976751553 doi "https://doi.org/10.1016/j.apsusc.2011.03.033" @default.
- W1976751553 hasPublicationYear "2011" @default.
- W1976751553 type Work @default.
- W1976751553 sameAs 1976751553 @default.
- W1976751553 citedByCount "20" @default.
- W1976751553 countsByYear W19767515532012 @default.
- W1976751553 countsByYear W19767515532013 @default.
- W1976751553 countsByYear W19767515532014 @default.
- W1976751553 countsByYear W19767515532016 @default.
- W1976751553 countsByYear W19767515532017 @default.
- W1976751553 countsByYear W19767515532018 @default.
- W1976751553 countsByYear W19767515532019 @default.
- W1976751553 countsByYear W19767515532020 @default.
- W1976751553 countsByYear W19767515532021 @default.
- W1976751553 countsByYear W19767515532022 @default.
- W1976751553 countsByYear W19767515532023 @default.
- W1976751553 crossrefType "journal-article" @default.
- W1976751553 hasAuthorship W1976751553A5033087785 @default.
- W1976751553 hasAuthorship W1976751553A5038309879 @default.
- W1976751553 hasAuthorship W1976751553A5038525585 @default.
- W1976751553 hasAuthorship W1976751553A5065478955 @default.
- W1976751553 hasConcept C111368507 @default.
- W1976751553 hasConcept C113196181 @default.
- W1976751553 hasConcept C127313418 @default.
- W1976751553 hasConcept C151730666 @default.
- W1976751553 hasConcept C159985019 @default.
- W1976751553 hasConcept C171250308 @default.
- W1976751553 hasConcept C178790620 @default.
- W1976751553 hasConcept C18293161 @default.
- W1976751553 hasConcept C185592680 @default.
- W1976751553 hasConcept C19067145 @default.
- W1976751553 hasConcept C192562407 @default.
- W1976751553 hasConcept C22423302 @default.
- W1976751553 hasConcept C2777289219 @default.
- W1976751553 hasConcept C2816523 @default.
- W1976751553 hasConcept C46275449 @default.
- W1976751553 hasConcept C61427134 @default.
- W1976751553 hasConcept C64297162 @default.
- W1976751553 hasConcept C86803240 @default.
- W1976751553 hasConceptScore W1976751553C111368507 @default.
- W1976751553 hasConceptScore W1976751553C113196181 @default.
- W1976751553 hasConceptScore W1976751553C127313418 @default.
- W1976751553 hasConceptScore W1976751553C151730666 @default.
- W1976751553 hasConceptScore W1976751553C159985019 @default.
- W1976751553 hasConceptScore W1976751553C171250308 @default.
- W1976751553 hasConceptScore W1976751553C178790620 @default.
- W1976751553 hasConceptScore W1976751553C18293161 @default.
- W1976751553 hasConceptScore W1976751553C185592680 @default.
- W1976751553 hasConceptScore W1976751553C19067145 @default.
- W1976751553 hasConceptScore W1976751553C192562407 @default.
- W1976751553 hasConceptScore W1976751553C22423302 @default.
- W1976751553 hasConceptScore W1976751553C2777289219 @default.
- W1976751553 hasConceptScore W1976751553C2816523 @default.
- W1976751553 hasConceptScore W1976751553C46275449 @default.
- W1976751553 hasConceptScore W1976751553C61427134 @default.
- W1976751553 hasConceptScore W1976751553C64297162 @default.
- W1976751553 hasConceptScore W1976751553C86803240 @default.
- W1976751553 hasIssue "15" @default.
- W1976751553 hasLocation W19767515531 @default.
- W1976751553 hasOpenAccess W1976751553 @default.
- W1976751553 hasPrimaryLocation W19767515531 @default.
- W1976751553 hasRelatedWork W1968373997 @default.
- W1976751553 hasRelatedWork W1999136732 @default.
- W1976751553 hasRelatedWork W2008424349 @default.
- W1976751553 hasRelatedWork W2071107448 @default.
- W1976751553 hasRelatedWork W2082528703 @default.
- W1976751553 hasRelatedWork W2086744665 @default.
- W1976751553 hasRelatedWork W2313176709 @default.
- W1976751553 hasRelatedWork W2373012329 @default.
- W1976751553 hasRelatedWork W2526521535 @default.
- W1976751553 hasRelatedWork W2592255793 @default.
- W1976751553 hasVolume "257" @default.
- W1976751553 isParatext "false" @default.
- W1976751553 isRetracted "false" @default.
- W1976751553 magId "1976751553" @default.