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- W1976804968 abstract "We have developed a new Cu-barrier dielectric film suitable for Cu/low-k integration. The film has an SiO/sub 2/ composition and is deposited using trimethoxysilane and N/sub 2/O chemistry. The Cu barrier properties of the film are as good as those of the conventional barrier material (P-SiN). The dielectric constant (k) of the film is 3.9, which is about half the dielectric constant of P-SiN film (k=17.5). The new film has been successfully integrated into damascene Cu interconnections as a Cu cap-layer material. The Cu interconnections had remarkably low line-to-line leakage current (<10 pA/cm/sup 2/) and sufficient dielectric breakdown lifetime under normal operating conditions." @default.
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- W1976804968 date "2001-01-01" @default.
- W1976804968 modified "2023-09-25" @default.
- W1976804968 title "New dielectric barrier for damascene Cu interconnection: trimethoxysilane-based SiO/sub 2/ film with k=3.9" @default.
- W1976804968 doi "https://doi.org/10.1109/iitc.2001.930073" @default.
- W1976804968 hasPublicationYear "2001" @default.
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