Matches in SemOpenAlex for { <https://semopenalex.org/work/W1976849743> ?p ?o ?g. }
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- W1976849743 endingPage "662" @default.
- W1976849743 startingPage "659" @default.
- W1976849743 abstract "Anisotropic thermal etching of 4H-SiC {0001} and {11-20} substrates was studied in the mixed gas of chlorine (Cl2) and oxygen (O2) over 900oC. Etch pits appeared only on the (0001) Si face. Etching rates depended on the temperature, O2/Cl2 ratio, and an etching direction on the substrate surfaces. When the mesa structure was formed by the selective etching method, sloped sidewalls were observed around the periphery of the mesa. The angle of sidewalls depended on the orientation of substrates." @default.
- W1976849743 created "2016-06-24" @default.
- W1976849743 creator A5006102960 @default.
- W1976849743 creator A5039380668 @default.
- W1976849743 creator A5062020307 @default.
- W1976849743 creator A5074056110 @default.
- W1976849743 creator A5085914124 @default.
- W1976849743 date "2008-09-01" @default.
- W1976849743 modified "2023-09-23" @default.
- W1976849743 title "Anisotropic Etching of SiC in the Mixed Gas of Chlorine and Oxygen" @default.
- W1976849743 doi "https://doi.org/10.4028/www.scientific.net/msf.600-603.659" @default.
- W1976849743 hasPublicationYear "2008" @default.
- W1976849743 type Work @default.
- W1976849743 sameAs 1976849743 @default.
- W1976849743 citedByCount "3" @default.
- W1976849743 countsByYear W19768497432014 @default.
- W1976849743 crossrefType "journal-article" @default.
- W1976849743 hasAuthorship W1976849743A5006102960 @default.
- W1976849743 hasAuthorship W1976849743A5039380668 @default.
- W1976849743 hasAuthorship W1976849743A5062020307 @default.
- W1976849743 hasAuthorship W1976849743A5074056110 @default.
- W1976849743 hasAuthorship W1976849743A5085914124 @default.
- W1976849743 hasConcept C100460472 @default.
- W1976849743 hasConcept C111368507 @default.
- W1976849743 hasConcept C120665830 @default.
- W1976849743 hasConcept C121332964 @default.
- W1976849743 hasConcept C127313418 @default.
- W1976849743 hasConcept C127413603 @default.
- W1976849743 hasConcept C1291036 @default.
- W1976849743 hasConcept C130472188 @default.
- W1976849743 hasConcept C153294291 @default.
- W1976849743 hasConcept C154843443 @default.
- W1976849743 hasConcept C159985019 @default.
- W1976849743 hasConcept C178790620 @default.
- W1976849743 hasConcept C185592680 @default.
- W1976849743 hasConcept C191897082 @default.
- W1976849743 hasConcept C192562407 @default.
- W1976849743 hasConcept C204530211 @default.
- W1976849743 hasConcept C2777289219 @default.
- W1976849743 hasConcept C2779227376 @default.
- W1976849743 hasConcept C33220542 @default.
- W1976849743 hasConcept C42360764 @default.
- W1976849743 hasConcept C505241676 @default.
- W1976849743 hasConcept C540031477 @default.
- W1976849743 hasConcept C85725439 @default.
- W1976849743 hasConceptScore W1976849743C100460472 @default.
- W1976849743 hasConceptScore W1976849743C111368507 @default.
- W1976849743 hasConceptScore W1976849743C120665830 @default.
- W1976849743 hasConceptScore W1976849743C121332964 @default.
- W1976849743 hasConceptScore W1976849743C127313418 @default.
- W1976849743 hasConceptScore W1976849743C127413603 @default.
- W1976849743 hasConceptScore W1976849743C1291036 @default.
- W1976849743 hasConceptScore W1976849743C130472188 @default.
- W1976849743 hasConceptScore W1976849743C153294291 @default.
- W1976849743 hasConceptScore W1976849743C154843443 @default.
- W1976849743 hasConceptScore W1976849743C159985019 @default.
- W1976849743 hasConceptScore W1976849743C178790620 @default.
- W1976849743 hasConceptScore W1976849743C185592680 @default.
- W1976849743 hasConceptScore W1976849743C191897082 @default.
- W1976849743 hasConceptScore W1976849743C192562407 @default.
- W1976849743 hasConceptScore W1976849743C204530211 @default.
- W1976849743 hasConceptScore W1976849743C2777289219 @default.
- W1976849743 hasConceptScore W1976849743C2779227376 @default.
- W1976849743 hasConceptScore W1976849743C33220542 @default.
- W1976849743 hasConceptScore W1976849743C42360764 @default.
- W1976849743 hasConceptScore W1976849743C505241676 @default.
- W1976849743 hasConceptScore W1976849743C540031477 @default.
- W1976849743 hasConceptScore W1976849743C85725439 @default.
- W1976849743 hasLocation W19768497431 @default.
- W1976849743 hasOpenAccess W1976849743 @default.
- W1976849743 hasPrimaryLocation W19768497431 @default.
- W1976849743 hasRelatedWork W1976560751 @default.
- W1976849743 hasRelatedWork W1976849743 @default.
- W1976849743 hasRelatedWork W1981251050 @default.
- W1976849743 hasRelatedWork W2018237554 @default.
- W1976849743 hasRelatedWork W2021099931 @default.
- W1976849743 hasRelatedWork W2100954478 @default.
- W1976849743 hasRelatedWork W2131076562 @default.
- W1976849743 hasRelatedWork W2378038125 @default.
- W1976849743 hasRelatedWork W2513921974 @default.
- W1976849743 hasRelatedWork W2094633807 @default.
- W1976849743 hasVolume "600-603" @default.
- W1976849743 isParatext "false" @default.
- W1976849743 isRetracted "false" @default.
- W1976849743 magId "1976849743" @default.
- W1976849743 workType "article" @default.