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- W1976945774 abstract "A large reduction in the LOCOS bird's beak is obtained by using a thick silicon nitride layer as an oxidation mask. Stress induced damage of the devices is avoided by using low-stress silicon-rich nitride. >" @default.
- W1976945774 created "2016-06-24" @default.
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- W1976945774 date "1995-05-25" @default.
- W1976945774 modified "2023-09-23" @default.
- W1976945774 title "Low-stress nitride as oxidation mask for submicrometre LOCOS isolation" @default.
- W1976945774 cites W2011257297 @default.
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- W1976945774 doi "https://doi.org/10.1049/el:19950626" @default.
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