FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W1976965670> ?p ?o ?g. }

• W1976965670 abstract "In this study, the authors investigate deep levels, which are induced by reactive ion etching (RIE) of n-type/p-type 4H–SiC, by deep level transient spectroscopy (DLTS). The capacitance of a Schottky contact fabricated on as-etched p-type SiC is abnormally small due to compensation or deactivation of acceptors extending to a depth of ∼14 μm, which is nearly equal to the epilayer thickness. The value of the capacitance can recover to that of a Schottky contact on as-grown samples after annealing at 1000 °C. However, various kinds of defects, IN2 (EC−0.30 eV), EN (EC−1.6 eV), IP1 (EV+0.30 eV), IP2 (EV+0.39 eV), IP4 (HK0: EV+0.72 eV), IP5 (EV+0.85 eV), IP7 (EV+1.3 eV), and EP (EV+1.4 eV), remain at a high concentration (average of total defect concentration in the region ranging from 0.3 μm to 1.0 μm:∼5×1014 cm−3) even after annealing at 1000 °C. The concentration of all these defects generated by RIE, except for the IP4 (HK0) center, remarkably decreases by thermal oxidation. In addition, the HK0 center can also be reduced significantly by a subsequent annealing at 1400 °C in Ar." @default.
• W1976965670 created "2016-06-24" @default.
• W1976965670 creator A5042722240 @default.
• W1976965670 creator A5042754568 @default.
• W1976965670 creator A5069176223 @default.
• W1976965670 creator A5088382332 @default.
• W1976965670 date "2010-07-15" @default.
• W1976965670 modified "2023-10-14" @default.
• W1976965670 title "Deep levels induced by reactive ion etching in n- and p-type 4H–SiC" @default.
• W1976965670 cites W1592499035 @default.
• W1976965670 cites W1964370724 @default.
• W1976965670 cites W1967375645 @default.
• W1976965670 cites W1971461497 @default.
• W1976965670 cites W1971533411 @default.
• W1976965670 cites W1972784140 @default.
• W1976965670 cites W1974185810 @default.
• W1976965670 cites W1982381330 @default.
• W1976965670 cites W1994223615 @default.
• W1976965670 cites W2001605737 @default.
• W1976965670 cites W2005249801 @default.
• W1976965670 cites W2020164307 @default.
• W1976965670 cites W2022573079 @default.
• W1976965670 cites W2025841210 @default.
• W1976965670 cites W2031428519 @default.
• W1976965670 cites W2031968810 @default.
• W1976965670 cites W2033194009 @default.
• W1976965670 cites W2034454057 @default.
• W1976965670 cites W2051509799 @default.
• W1976965670 cites W2069519700 @default.
• W1976965670 cites W2071623513 @default.
• W1976965670 cites W2087588623 @default.
• W1976965670 doi "https://doi.org/10.1063/1.3460636" @default.
• W1976965670 hasPublicationYear "2010" @default.
• W1976965670 type Work @default.
• W1976965670 sameAs 1976965670 @default.
• W1976965670 citedByCount "33" @default.
• W1976965670 countsByYear W19769656702012 @default.
• W1976965670 countsByYear W19769656702013 @default.
• W1976965670 countsByYear W19769656702014 @default.
• W1976965670 countsByYear W19769656702015 @default.
• W1976965670 countsByYear W19769656702016 @default.
• W1976965670 countsByYear W19769656702017 @default.
• W1976965670 countsByYear W19769656702018 @default.
• W1976965670 countsByYear W19769656702019 @default.
• W1976965670 countsByYear W19769656702020 @default.
• W1976965670 countsByYear W19769656702021 @default.
• W1976965670 crossrefType "journal-article" @default.
• W1976965670 hasAuthorship W1976965670A5042722240 @default.
• W1976965670 hasAuthorship W1976965670A5042754568 @default.
• W1976965670 hasAuthorship W1976965670A5069176223 @default.
• W1976965670 hasAuthorship W1976965670A5088382332 @default.
• W1976965670 hasBestOaLocation W19769656702 @default.
• W1976965670 hasConcept C100460472 @default.
• W1976965670 hasConcept C113196181 @default.
• W1976965670 hasConcept C130472188 @default.
• W1976965670 hasConcept C145148216 @default.
• W1976965670 hasConcept C147789679 @default.
• W1976965670 hasConcept C16115445 @default.
• W1976965670 hasConcept C171250308 @default.
• W1976965670 hasConcept C17525397 @default.
• W1976965670 hasConcept C178790620 @default.
• W1976965670 hasConcept C185592680 @default.
• W1976965670 hasConcept C191897082 @default.
• W1976965670 hasConcept C192562407 @default.
• W1976965670 hasConcept C205200001 @default.
• W1976965670 hasConcept C2777855556 @default.
• W1976965670 hasConcept C2779227376 @default.
• W1976965670 hasConcept C2780080961 @default.
• W1976965670 hasConcept C30066665 @default.
• W1976965670 hasConcept C43617362 @default.
• W1976965670 hasConcept C49040817 @default.
• W1976965670 hasConcept C544956773 @default.
• W1976965670 hasConcept C78434282 @default.
• W1976965670 hasConceptScore W1976965670C100460472 @default.
• W1976965670 hasConceptScore W1976965670C113196181 @default.
• W1976965670 hasConceptScore W1976965670C130472188 @default.
• W1976965670 hasConceptScore W1976965670C145148216 @default.
• W1976965670 hasConceptScore W1976965670C147789679 @default.
• W1976965670 hasConceptScore W1976965670C16115445 @default.
• W1976965670 hasConceptScore W1976965670C171250308 @default.
• W1976965670 hasConceptScore W1976965670C17525397 @default.
• W1976965670 hasConceptScore W1976965670C178790620 @default.
• W1976965670 hasConceptScore W1976965670C185592680 @default.
• W1976965670 hasConceptScore W1976965670C191897082 @default.
• W1976965670 hasConceptScore W1976965670C192562407 @default.
• W1976965670 hasConceptScore W1976965670C205200001 @default.
• W1976965670 hasConceptScore W1976965670C2777855556 @default.
• W1976965670 hasConceptScore W1976965670C2779227376 @default.
• W1976965670 hasConceptScore W1976965670C2780080961 @default.
• W1976965670 hasConceptScore W1976965670C30066665 @default.
• W1976965670 hasConceptScore W1976965670C43617362 @default.
• W1976965670 hasConceptScore W1976965670C49040817 @default.
• W1976965670 hasConceptScore W1976965670C544956773 @default.
• W1976965670 hasConceptScore W1976965670C78434282 @default.
• W1976965670 hasIssue "2" @default.
• W1976965670 hasLocation W19769656701 @default.
• W1976965670 hasLocation W19769656702 @default.
• W1976965670 hasOpenAccess W1976965670 @default.
• W1976965670 hasPrimaryLocation W19769656701 @default.
• W1976965670 hasRelatedWork W1501882044 @default.

• next