Matches in SemOpenAlex for { <https://semopenalex.org/work/W1977054877> ?p ?o ?g. }
- W1977054877 endingPage "19" @default.
- W1977054877 startingPage "13" @default.
- W1977054877 abstract "The native oxides on Ge substrates can be transformed into GeOxNy by in situ NH3 plasma pretreatment. The interfacial and electrical properties of HfO2 caps gate stacks on Ge with and without ultrathin GeOxNy barrier layers have been investigated thoroughly. HfO2/GeOxNy/Ge stacking structure shows a sharp and flat interface between HfO2 and Ge substrates without recognized interfacial layer. In situ NH3 plasma pretreatment effectively improves the electrical properties such as higher accumulation capacitance, smaller frequency dispersion, and lower interface trap density (Dit) than without NH3 plasma pretreatment. It is ascribed to that fact that the GeOxNy barrier layer between HfO2 and Ge substrates shows better thermal stability and suppresses the Ge outdiffusion. The 3-nm-thick HfO2 gate stacks on Ge with 60 s NH3 plasma pretreatment exhibit a capacitance equivalent thickness of 0.96 nm and a leakage current density of 1.12 mA/cm2 at +1 V gate bias with acceptable Dit value of 3.42 × 1012 eV−1 cm−2. These results indicate that the surface nitridation by in situ NH3 plasma pretreatment may be a promising approach for the realization of high quality Ge-based transistor devices." @default.
- W1977054877 created "2016-06-24" @default.
- W1977054877 creator A5011337463 @default.
- W1977054877 creator A5011648245 @default.
- W1977054877 creator A5013660755 @default.
- W1977054877 creator A5018827905 @default.
- W1977054877 creator A5039617522 @default.
- W1977054877 creator A5049313488 @default.
- W1977054877 creator A5068164913 @default.
- W1977054877 creator A5082857859 @default.
- W1977054877 date "2015-01-01" @default.
- W1977054877 modified "2023-09-26" @default.
- W1977054877 title "HfO2/GeO N /Ge gate stacks with sub-nanometer capacitance equivalent thickness and low interface trap density by in situ NH3 plasma pretreatment" @default.
- W1977054877 cites W1559703178 @default.
- W1977054877 cites W1565210720 @default.
- W1977054877 cites W1957052048 @default.
- W1977054877 cites W1969261628 @default.
- W1977054877 cites W1973419316 @default.
- W1977054877 cites W1982701132 @default.
- W1977054877 cites W1984167409 @default.
- W1977054877 cites W1990713771 @default.
- W1977054877 cites W1991626803 @default.
- W1977054877 cites W1995336203 @default.
- W1977054877 cites W2000306023 @default.
- W1977054877 cites W2020600497 @default.
- W1977054877 cites W2027367075 @default.
- W1977054877 cites W2027626977 @default.
- W1977054877 cites W2036320499 @default.
- W1977054877 cites W2038255851 @default.
- W1977054877 cites W2041601534 @default.
- W1977054877 cites W2043757353 @default.
- W1977054877 cites W2043928798 @default.
- W1977054877 cites W2067849420 @default.
- W1977054877 cites W2072451721 @default.
- W1977054877 cites W2075050869 @default.
- W1977054877 cites W2080035664 @default.
- W1977054877 cites W2080519707 @default.
- W1977054877 cites W2090214562 @default.
- W1977054877 cites W2091050149 @default.
- W1977054877 cites W2125074739 @default.
- W1977054877 cites W2169493175 @default.
- W1977054877 cites W2241020900 @default.
- W1977054877 cites W4234048866 @default.
- W1977054877 cites W49962006 @default.
- W1977054877 doi "https://doi.org/10.1016/j.apsusc.2014.11.073" @default.
- W1977054877 hasPublicationYear "2015" @default.
- W1977054877 type Work @default.
- W1977054877 sameAs 1977054877 @default.
- W1977054877 citedByCount "7" @default.
- W1977054877 countsByYear W19770548772016 @default.
- W1977054877 countsByYear W19770548772017 @default.
- W1977054877 countsByYear W19770548772019 @default.
- W1977054877 countsByYear W19770548772021 @default.
- W1977054877 countsByYear W19770548772022 @default.
- W1977054877 crossrefType "journal-article" @default.
- W1977054877 hasAuthorship W1977054877A5011337463 @default.
- W1977054877 hasAuthorship W1977054877A5011648245 @default.
- W1977054877 hasAuthorship W1977054877A5013660755 @default.
- W1977054877 hasAuthorship W1977054877A5018827905 @default.
- W1977054877 hasAuthorship W1977054877A5039617522 @default.
- W1977054877 hasAuthorship W1977054877A5049313488 @default.
- W1977054877 hasAuthorship W1977054877A5068164913 @default.
- W1977054877 hasAuthorship W1977054877A5082857859 @default.
- W1977054877 hasConcept C113196181 @default.
- W1977054877 hasConcept C121332964 @default.
- W1977054877 hasConcept C139719470 @default.
- W1977054877 hasConcept C147789679 @default.
- W1977054877 hasConcept C162324750 @default.
- W1977054877 hasConcept C171250308 @default.
- W1977054877 hasConcept C17525397 @default.
- W1977054877 hasConcept C178790620 @default.
- W1977054877 hasConcept C185592680 @default.
- W1977054877 hasConcept C192562407 @default.
- W1977054877 hasConcept C2777042071 @default.
- W1977054877 hasConcept C2777822432 @default.
- W1977054877 hasConcept C2779227376 @default.
- W1977054877 hasConcept C30066665 @default.
- W1977054877 hasConcept C43617362 @default.
- W1977054877 hasConcept C49040817 @default.
- W1977054877 hasConcept C62520636 @default.
- W1977054877 hasConcept C82706917 @default.
- W1977054877 hasConceptScore W1977054877C113196181 @default.
- W1977054877 hasConceptScore W1977054877C121332964 @default.
- W1977054877 hasConceptScore W1977054877C139719470 @default.
- W1977054877 hasConceptScore W1977054877C147789679 @default.
- W1977054877 hasConceptScore W1977054877C162324750 @default.
- W1977054877 hasConceptScore W1977054877C171250308 @default.
- W1977054877 hasConceptScore W1977054877C17525397 @default.
- W1977054877 hasConceptScore W1977054877C178790620 @default.
- W1977054877 hasConceptScore W1977054877C185592680 @default.
- W1977054877 hasConceptScore W1977054877C192562407 @default.
- W1977054877 hasConceptScore W1977054877C2777042071 @default.
- W1977054877 hasConceptScore W1977054877C2777822432 @default.
- W1977054877 hasConceptScore W1977054877C2779227376 @default.
- W1977054877 hasConceptScore W1977054877C30066665 @default.
- W1977054877 hasConceptScore W1977054877C43617362 @default.
- W1977054877 hasConceptScore W1977054877C49040817 @default.
- W1977054877 hasConceptScore W1977054877C62520636 @default.