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- W1977071362 abstract "We report a single-crystal silicon (SCS)-based micromirror that is electrothermally actuated by a platinum heater integrated at the end of a thermal bimorph actuator. The mirror size is 1 mm times1 mm. A large rotation angle of 124 deg has been obtained at a dc voltage of 12.5 V. The resonant frequency of the device is 336 Hz. The radius of curvature of the mirror plate is 130 mm. A lumped circuit model has been developed for electrothermomechanical behavioral simulation and design optimization. The simulation results by the circuit model match the experimental data to within 6.9%" @default.
- W1977071362 created "2016-06-24" @default.
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- W1977071362 date "2007-01-01" @default.
- W1977071362 modified "2023-09-22" @default.
- W1977071362 title "124<formula formulatype=inline><tex>$^circ$</tex></formula> Rotation Angle Electrothermal Micromirror With Integrated Platinum Heater" @default.
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- W1977071362 doi "https://doi.org/10.1109/jstqe.2007.894066" @default.
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