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- W1977133069 abstract "Thin gate SiO/sub 2/ films thinner than 200 /spl Aring/ often deteriorate throughout developmentaf VLSI processes, including refractory metal or silicide gates and ion- or plasma-assisted processes. Thermal nitridation of such SiO/sub 2/ films improves the MOS characteristics by producing surface protective layers against impurity penetration and by producing good interfacial characteristics. This fact indicates that a thermally grown silicon nitride film on a silicon substrate is the most promising candidate for a very-thin gate insulator. Experimental data show significant benefits from the nitride film for future VLSI devices." @default.
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- W1977133069 date "1982-04-01" @default.
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- W1977133069 title "Advantages of Thermal Nitride and Nitroxide Gate Films in VLSI Process" @default.
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- W1977133069 doi "https://doi.org/10.1109/jssc.1982.1051704" @default.
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