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- W1977148244 abstract "The interfacial oxide layers, generated on Si substrates during the initial stage of atomic layer deposition (ALD), have been investigated depending on the oxygen reactants, oxygen plasma and water. In the plasma-enhanced ALD (PEALD) using oxygen plasma, a -thick interfacial layer, which was intermixed with Hf–Si–O and having a dielectric constant of 6.5, was formed, while water made a -thick interfacial layer composed mainly of . Additionally, by utilizing oxygen plasma, the of the film itself was increased up to 22.2 resulting in a higher effective , and a much lower leakage current density was also obtained." @default.
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- W1977148244 date "2006-01-01" @default.
- W1977148244 modified "2023-10-17" @default.
- W1977148244 title "Interfacial Layer Properties of HfO[sub 2] Films Formed by Plasma-Enhanced Atomic Layer Deposition on Silicon" @default.
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- W1977148244 doi "https://doi.org/10.1149/1.2183887" @default.
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