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• W1977181647 abstract "Thermoelectric hydrogen sensor (THS) is a promising candidate for a hydrogen leak alarm system because of its unique, reliable working principle and its performance has been improved by fabricating it as a micro-device. In this study, we have investigated the performance of a micro-THS with new design of 4×4 mm2 chip. The integration of a thermoelectric thin film of B-dope SiGe and a ceramic catalyst of Pt 40 mass% loaded alumina into a micro hot-plate on a thin membrane, has improved its performance. We have demonstrated that the micro-THS detected the wide range of H2 concentration in air from low as 0.5 ppm to high as 5 vol%." @default.
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• W1977181647 date "2006-01-01" @default.
• W1977181647 modified "2023-09-23" @default.
• W1977181647 title "New Structural Design of Micro-Thermoelectric Sensor for Wide Range Hydrogen Detection" @default.
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• W1977181647 doi "https://doi.org/10.2109/jcersj.114.853" @default.
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