Matches in SemOpenAlex for { <https://semopenalex.org/work/W1977203166> ?p ?o ?g. }
Showing items 1 to 90 of
90
with 100 items per page.
- W1977203166 endingPage "334" @default.
- W1977203166 startingPage "328" @default.
- W1977203166 abstract "Abstract The crystallization route of thin SrBi2Ta2O9 (SBT) films deposited on Pt(100 nm)/Ti(10 nm)/SiO2/Si substrate is investigated at different annealing temperatures by atomic force microscopy (AFM) and X-ray diffractometry (XRD). To evaluate the SBT film properties for low voltage operation and for high storage density (>16 MBit), SBT is deposited at different film thicknesses. Furthermore, the performance of a Pt/SBT/Pt capacitor on a barrier-/contact-layer/polysilicon-plug architecture suitable for stacked capacitor memories is investigated by transmission electron microscopy (TEM)/energy dispersive X-ray analysis (EDX) and electrical measurements. It is shown that an oxidized and highly resistive contact layer can be recovered by electrical pulses. Finally, a process solution for a successful integration of 38 nm thin SBT films into this structure is provided." @default.
- W1977203166 created "2016-06-24" @default.
- W1977203166 creator A5003850300 @default.
- W1977203166 creator A5016975248 @default.
- W1977203166 creator A5017298271 @default.
- W1977203166 creator A5041996726 @default.
- W1977203166 creator A5052798324 @default.
- W1977203166 creator A5057009924 @default.
- W1977203166 creator A5058988465 @default.
- W1977203166 creator A5063706301 @default.
- W1977203166 creator A5081892693 @default.
- W1977203166 date "2005-02-01" @default.
- W1977203166 modified "2023-09-25" @default.
- W1977203166 title "Integration of stacked capacitor module with ultra-thin ferroelectric SrBi2Ta2O9 film for high density ferroelectric random access memory applications at low voltage operation" @default.
- W1977203166 cites W1560052200 @default.
- W1977203166 cites W1971591260 @default.
- W1977203166 cites W2020134774 @default.
- W1977203166 cites W2036802251 @default.
- W1977203166 cites W2042418864 @default.
- W1977203166 cites W2050060802 @default.
- W1977203166 cites W2064841664 @default.
- W1977203166 cites W2171139837 @default.
- W1977203166 doi "https://doi.org/10.1016/j.tsf.2004.08.087" @default.
- W1977203166 hasPublicationYear "2005" @default.
- W1977203166 type Work @default.
- W1977203166 sameAs 1977203166 @default.
- W1977203166 citedByCount "8" @default.
- W1977203166 countsByYear W19772031662016 @default.
- W1977203166 countsByYear W19772031662021 @default.
- W1977203166 crossrefType "journal-article" @default.
- W1977203166 hasAuthorship W1977203166A5003850300 @default.
- W1977203166 hasAuthorship W1977203166A5016975248 @default.
- W1977203166 hasAuthorship W1977203166A5017298271 @default.
- W1977203166 hasAuthorship W1977203166A5041996726 @default.
- W1977203166 hasAuthorship W1977203166A5052798324 @default.
- W1977203166 hasAuthorship W1977203166A5057009924 @default.
- W1977203166 hasAuthorship W1977203166A5058988465 @default.
- W1977203166 hasAuthorship W1977203166A5063706301 @default.
- W1977203166 hasAuthorship W1977203166A5081892693 @default.
- W1977203166 hasConcept C119599485 @default.
- W1977203166 hasConcept C127413603 @default.
- W1977203166 hasConcept C133386390 @default.
- W1977203166 hasConcept C165801399 @default.
- W1977203166 hasConcept C171250308 @default.
- W1977203166 hasConcept C177950962 @default.
- W1977203166 hasConcept C189366214 @default.
- W1977203166 hasConcept C19067145 @default.
- W1977203166 hasConcept C192562407 @default.
- W1977203166 hasConcept C2994168587 @default.
- W1977203166 hasConcept C41008148 @default.
- W1977203166 hasConcept C49040817 @default.
- W1977203166 hasConcept C52192207 @default.
- W1977203166 hasConcept C79090758 @default.
- W1977203166 hasConcept C9390403 @default.
- W1977203166 hasConceptScore W1977203166C119599485 @default.
- W1977203166 hasConceptScore W1977203166C127413603 @default.
- W1977203166 hasConceptScore W1977203166C133386390 @default.
- W1977203166 hasConceptScore W1977203166C165801399 @default.
- W1977203166 hasConceptScore W1977203166C171250308 @default.
- W1977203166 hasConceptScore W1977203166C177950962 @default.
- W1977203166 hasConceptScore W1977203166C189366214 @default.
- W1977203166 hasConceptScore W1977203166C19067145 @default.
- W1977203166 hasConceptScore W1977203166C192562407 @default.
- W1977203166 hasConceptScore W1977203166C2994168587 @default.
- W1977203166 hasConceptScore W1977203166C41008148 @default.
- W1977203166 hasConceptScore W1977203166C49040817 @default.
- W1977203166 hasConceptScore W1977203166C52192207 @default.
- W1977203166 hasConceptScore W1977203166C79090758 @default.
- W1977203166 hasConceptScore W1977203166C9390403 @default.
- W1977203166 hasIssue "2" @default.
- W1977203166 hasLocation W19772031661 @default.
- W1977203166 hasOpenAccess W1977203166 @default.
- W1977203166 hasPrimaryLocation W19772031661 @default.
- W1977203166 hasRelatedWork W1553096096 @default.
- W1977203166 hasRelatedWork W1648452824 @default.
- W1977203166 hasRelatedWork W2050205518 @default.
- W1977203166 hasRelatedWork W2080319784 @default.
- W1977203166 hasRelatedWork W2112116135 @default.
- W1977203166 hasRelatedWork W2154182397 @default.
- W1977203166 hasRelatedWork W2161356585 @default.
- W1977203166 hasRelatedWork W2312621025 @default.
- W1977203166 hasRelatedWork W4283268264 @default.
- W1977203166 hasRelatedWork W4363674978 @default.
- W1977203166 hasVolume "473" @default.
- W1977203166 isParatext "false" @default.
- W1977203166 isRetracted "false" @default.
- W1977203166 magId "1977203166" @default.
- W1977203166 workType "article" @default.