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- W1977325408 endingPage "1675" @default.
- W1977325408 startingPage "1672" @default.
- W1977325408 abstract "Variable-shaped beam schemes are very promising for advanced VLSI pattern generation. Some of them are made up of two beam shaping apertures, beam shaping deflectors, and projection lenses. In such devices, exposure speed is proportional to the total beam current finally projected onto the target. When the beam current is increased in this scheme, beam blurring caused by space charge effect becomes greater as the beam current increases. The observed beam blurring becomes much greater on the edges corresponding to the sides of the first beam shaping aperture than on those of the second one. A new beam shaping scheme is proposed for reducing this blurring. In this scheme, auxiliary beam shaping means are provided in the upper stream of the previously developed beam shaping system. The beam is preshaped by the new scheme so as to reduce the beam current between the first and the second beam shaping apertures by an amount which is the sum of the finally required and marginal portions, and a clearer beam shape can be formed on the target. Furthermore, to shorten the path length of electrons for reducing the above blurring, a construction method for an octupole electrostatic deflector is developed. In this method, newly designed isolating and supporting mechanisms for electrodes are adopted so as to minimize the size of the deflectors, which are sufficiently minute to be placed in the electron lens and to shorten the path length of electorn beam." @default.
- W1977325408 created "2016-06-24" @default.
- W1977325408 creator A5019230680 @default.
- W1977325408 creator A5058110076 @default.
- W1977325408 creator A5065115002 @default.
- W1977325408 creator A5087947782 @default.
- W1977325408 date "1979-11-01" @default.
- W1977325408 modified "2023-10-14" @default.
- W1977325408 title "Triple slit scheme for high current variable‐shaped beam forming" @default.
- W1977325408 doi "https://doi.org/10.1116/1.570270" @default.
- W1977325408 hasPublicationYear "1979" @default.
- W1977325408 type Work @default.
- W1977325408 sameAs 1977325408 @default.
- W1977325408 citedByCount "0" @default.
- W1977325408 crossrefType "journal-article" @default.
- W1977325408 hasAuthorship W1977325408A5019230680 @default.
- W1977325408 hasAuthorship W1977325408A5058110076 @default.
- W1977325408 hasAuthorship W1977325408A5065115002 @default.
- W1977325408 hasAuthorship W1977325408A5087947782 @default.
- W1977325408 hasConcept C100796255 @default.
- W1977325408 hasConcept C115171683 @default.
- W1977325408 hasConcept C119440689 @default.
- W1977325408 hasConcept C120665830 @default.
- W1977325408 hasConcept C121332964 @default.
- W1977325408 hasConcept C148043351 @default.
- W1977325408 hasConcept C168834538 @default.
- W1977325408 hasConcept C173781883 @default.
- W1977325408 hasConcept C192562407 @default.
- W1977325408 hasConcept C24890656 @default.
- W1977325408 hasConcept C2984025587 @default.
- W1977325408 hasConcept C520434653 @default.
- W1977325408 hasConcept C62172962 @default.
- W1977325408 hasConcept C78336883 @default.
- W1977325408 hasConcept C97355855 @default.
- W1977325408 hasConceptScore W1977325408C100796255 @default.
- W1977325408 hasConceptScore W1977325408C115171683 @default.
- W1977325408 hasConceptScore W1977325408C119440689 @default.
- W1977325408 hasConceptScore W1977325408C120665830 @default.
- W1977325408 hasConceptScore W1977325408C121332964 @default.
- W1977325408 hasConceptScore W1977325408C148043351 @default.
- W1977325408 hasConceptScore W1977325408C168834538 @default.
- W1977325408 hasConceptScore W1977325408C173781883 @default.
- W1977325408 hasConceptScore W1977325408C192562407 @default.
- W1977325408 hasConceptScore W1977325408C24890656 @default.
- W1977325408 hasConceptScore W1977325408C2984025587 @default.
- W1977325408 hasConceptScore W1977325408C520434653 @default.
- W1977325408 hasConceptScore W1977325408C62172962 @default.
- W1977325408 hasConceptScore W1977325408C78336883 @default.
- W1977325408 hasConceptScore W1977325408C97355855 @default.
- W1977325408 hasIssue "6" @default.
- W1977325408 hasLocation W19773254081 @default.
- W1977325408 hasOpenAccess W1977325408 @default.
- W1977325408 hasPrimaryLocation W19773254081 @default.
- W1977325408 hasRelatedWork W2005839617 @default.
- W1977325408 hasRelatedWork W2027557419 @default.
- W1977325408 hasRelatedWork W2064563376 @default.
- W1977325408 hasRelatedWork W2072349578 @default.
- W1977325408 hasRelatedWork W2137687570 @default.
- W1977325408 hasRelatedWork W2154191539 @default.
- W1977325408 hasRelatedWork W2365190485 @default.
- W1977325408 hasRelatedWork W2370640477 @default.
- W1977325408 hasRelatedWork W2683146533 @default.
- W1977325408 hasRelatedWork W3019212282 @default.
- W1977325408 hasVolume "16" @default.
- W1977325408 isParatext "false" @default.
- W1977325408 isRetracted "false" @default.
- W1977325408 magId "1977325408" @default.
- W1977325408 workType "article" @default.