Matches in SemOpenAlex for { <https://semopenalex.org/work/W1977326264> ?p ?o ?g. }
Showing items 1 to 98 of
98
with 100 items per page.
- W1977326264 endingPage "568" @default.
- W1977326264 startingPage "564" @default.
- W1977326264 abstract "In this work, thin films of SiCN have been deposited by pulsed laser deposition on silicon substrates by KrF (248 nm) excimer laser ablation of a SiC sintered target in a vacuum system at room temperature. To obtain various stoichiometries, molecular nitrogen is introduced in the deposition chamber in the 5 to 500 mTorr pressure range. The resultant SiCxNy films are compared to the one prepared in a high vacuum environment (no N2 gas). The film growth was monitored by real-time kinetic ellipsometry at a single photon-energy (2.5 eV). The film was analyzed by spectro-ellipsometry in the photon-energy range of 1.5<hv<5.0 eV at the end of the deposition process. Tauc's plots are used to estimate the optical band-gap of the films as a function of the N2 gas pressure. High resolution in situ X-ray photoelectron spectroscopy characterization was performed on every film. The bonding character of the elements in the films is obtained by deconvoluting the XPS peaks. The ellipsometric and XPS results suggest that a new phase alloy is present in the SiCxNy films." @default.
- W1977326264 created "2016-06-24" @default.
- W1977326264 creator A5000117965 @default.
- W1977326264 creator A5010446335 @default.
- W1977326264 creator A5010855275 @default.
- W1977326264 creator A5068019993 @default.
- W1977326264 date "1998-05-01" @default.
- W1977326264 modified "2023-09-25" @default.
- W1977326264 title "SiCxNy thin films alloys prepared by pulsed excimer laser deposition" @default.
- W1977326264 cites W1967159007 @default.
- W1977326264 cites W2021231247 @default.
- W1977326264 cites W2039537897 @default.
- W1977326264 cites W2076683654 @default.
- W1977326264 cites W2092332261 @default.
- W1977326264 cites W2176913299 @default.
- W1977326264 doi "https://doi.org/10.1016/s0169-4332(97)00706-x" @default.
- W1977326264 hasPublicationYear "1998" @default.
- W1977326264 type Work @default.
- W1977326264 sameAs 1977326264 @default.
- W1977326264 citedByCount "37" @default.
- W1977326264 countsByYear W19773262642012 @default.
- W1977326264 countsByYear W19773262642013 @default.
- W1977326264 countsByYear W19773262642014 @default.
- W1977326264 countsByYear W19773262642018 @default.
- W1977326264 countsByYear W19773262642020 @default.
- W1977326264 crossrefType "journal-article" @default.
- W1977326264 hasAuthorship W1977326264A5000117965 @default.
- W1977326264 hasAuthorship W1977326264A5010446335 @default.
- W1977326264 hasAuthorship W1977326264A5010855275 @default.
- W1977326264 hasAuthorship W1977326264A5068019993 @default.
- W1977326264 hasConcept C113196181 @default.
- W1977326264 hasConcept C120665830 @default.
- W1977326264 hasConcept C121332964 @default.
- W1977326264 hasConcept C127413603 @default.
- W1977326264 hasConcept C144082473 @default.
- W1977326264 hasConcept C151730666 @default.
- W1977326264 hasConcept C171250308 @default.
- W1977326264 hasConcept C175708663 @default.
- W1977326264 hasConcept C178790620 @default.
- W1977326264 hasConcept C181966813 @default.
- W1977326264 hasConcept C18293161 @default.
- W1977326264 hasConcept C185592680 @default.
- W1977326264 hasConcept C19067145 @default.
- W1977326264 hasConcept C192562407 @default.
- W1977326264 hasConcept C2779188808 @default.
- W1977326264 hasConcept C2780477314 @default.
- W1977326264 hasConcept C2816523 @default.
- W1977326264 hasConcept C37982897 @default.
- W1977326264 hasConcept C42360764 @default.
- W1977326264 hasConcept C43617362 @default.
- W1977326264 hasConcept C49040817 @default.
- W1977326264 hasConcept C520434653 @default.
- W1977326264 hasConcept C64297162 @default.
- W1977326264 hasConcept C86803240 @default.
- W1977326264 hasConceptScore W1977326264C113196181 @default.
- W1977326264 hasConceptScore W1977326264C120665830 @default.
- W1977326264 hasConceptScore W1977326264C121332964 @default.
- W1977326264 hasConceptScore W1977326264C127413603 @default.
- W1977326264 hasConceptScore W1977326264C144082473 @default.
- W1977326264 hasConceptScore W1977326264C151730666 @default.
- W1977326264 hasConceptScore W1977326264C171250308 @default.
- W1977326264 hasConceptScore W1977326264C175708663 @default.
- W1977326264 hasConceptScore W1977326264C178790620 @default.
- W1977326264 hasConceptScore W1977326264C181966813 @default.
- W1977326264 hasConceptScore W1977326264C18293161 @default.
- W1977326264 hasConceptScore W1977326264C185592680 @default.
- W1977326264 hasConceptScore W1977326264C19067145 @default.
- W1977326264 hasConceptScore W1977326264C192562407 @default.
- W1977326264 hasConceptScore W1977326264C2779188808 @default.
- W1977326264 hasConceptScore W1977326264C2780477314 @default.
- W1977326264 hasConceptScore W1977326264C2816523 @default.
- W1977326264 hasConceptScore W1977326264C37982897 @default.
- W1977326264 hasConceptScore W1977326264C42360764 @default.
- W1977326264 hasConceptScore W1977326264C43617362 @default.
- W1977326264 hasConceptScore W1977326264C49040817 @default.
- W1977326264 hasConceptScore W1977326264C520434653 @default.
- W1977326264 hasConceptScore W1977326264C64297162 @default.
- W1977326264 hasConceptScore W1977326264C86803240 @default.
- W1977326264 hasLocation W19773262641 @default.
- W1977326264 hasOpenAccess W1977326264 @default.
- W1977326264 hasPrimaryLocation W19773262641 @default.
- W1977326264 hasRelatedWork W1613738666 @default.
- W1977326264 hasRelatedWork W1977326264 @default.
- W1977326264 hasRelatedWork W2020507027 @default.
- W1977326264 hasRelatedWork W2027047295 @default.
- W1977326264 hasRelatedWork W2066532641 @default.
- W1977326264 hasRelatedWork W2071534217 @default.
- W1977326264 hasRelatedWork W2074019919 @default.
- W1977326264 hasRelatedWork W314181376 @default.
- W1977326264 hasRelatedWork W60061739 @default.
- W1977326264 hasRelatedWork W2084081243 @default.
- W1977326264 hasVolume "127-129" @default.
- W1977326264 isParatext "false" @default.
- W1977326264 isRetracted "false" @default.
- W1977326264 magId "1977326264" @default.
- W1977326264 workType "article" @default.