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• W1977361567 endingPage "381" @default.
• W1977361567 startingPage "377" @default.
• W1977361567 abstract "In this work the authors study the interaction of F with point defects and the influence of F on B diffusion in crystalline Si. The authors perform 25 and 100 keV F+ implants and combine them with a 40 keV Si+ implant. The appearance of peaks in the F profile during annealing supports the idea of the formation of F complexes with vacancies and Si interstitials. In all samples implanted with F+ analyzed in this work, B diffusion is higher than in equilibrium conditions indicating that F+ implants in crystalline Si produce a Si interstitial supersaturation. However, B diffusion is reduced when F+ is coimplanted with Si, compared to only Si implants. This effect is more evident when B is located in the region where the F+ implant generates an excess of vacancies, but it also appears in the Si interstitial-rich region. The results indicate that the effect of F on B diffusion in crystalline Si is time dependent." @default.
• W1977361567 created "2016-06-24" @default.
• W1977361567 creator A5009474761 @default.
• W1977361567 creator A5009720430 @default.
• W1977361567 creator A5014107911 @default.
• W1977361567 creator A5048719407 @default.
• W1977361567 creator A5050815010 @default.
• W1977361567 creator A5058463930 @default.
• W1977361567 creator A5065923157 @default.
• W1977361567 creator A5075315745 @default.
• W1977361567 creator A5075379871 @default.
• W1977361567 creator A5081542068 @default.
• W1977361567 date "2008-01-01" @default.
• W1977361567 modified "2023-09-26" @default.
• W1977361567 title "Evolution of fluorine and boron profiles during annealing in crystalline Si" @default.
• W1977361567 cites W1503827802 @default.
• W1977361567 cites W1981092848 @default.
• W1977361567 cites W1982481128 @default.
• W1977361567 cites W1990505290 @default.
• W1977361567 cites W1998404331 @default.
• W1977361567 cites W2019596327 @default.
• W1977361567 cites W2022672867 @default.
• W1977361567 cites W2032150834 @default.
• W1977361567 cites W2040019784 @default.
• W1977361567 cites W2049266835 @default.
• W1977361567 cites W2086451682 @default.
• W1977361567 doi "https://doi.org/10.1116/1.2794738" @default.
• W1977361567 hasPublicationYear "2008" @default.
• W1977361567 type Work @default.
• W1977361567 sameAs 1977361567 @default.
• W1977361567 citedByCount "3" @default.
• W1977361567 countsByYear W19773615672013 @default.
• W1977361567 crossrefType "journal-article" @default.
• W1977361567 hasAuthorship W1977361567A5009474761 @default.
• W1977361567 hasAuthorship W1977361567A5009720430 @default.
• W1977361567 hasAuthorship W1977361567A5014107911 @default.
• W1977361567 hasAuthorship W1977361567A5048719407 @default.
• W1977361567 hasAuthorship W1977361567A5050815010 @default.
• W1977361567 hasAuthorship W1977361567A5058463930 @default.
• W1977361567 hasAuthorship W1977361567A5065923157 @default.
• W1977361567 hasAuthorship W1977361567A5075315745 @default.
• W1977361567 hasAuthorship W1977361567A5075379871 @default.
• W1977361567 hasAuthorship W1977361567A5081542068 @default.
• W1977361567 hasBestOaLocation W19773615672 @default.
• W1977361567 hasConcept C113196181 @default.
• W1977361567 hasConcept C121332964 @default.
• W1977361567 hasConcept C145148216 @default.
• W1977361567 hasConcept C164675345 @default.
• W1977361567 hasConcept C178790620 @default.
• W1977361567 hasConcept C185592680 @default.
• W1977361567 hasConcept C191897082 @default.
• W1977361567 hasConcept C192562407 @default.
• W1977361567 hasConcept C200447597 @default.
• W1977361567 hasConcept C2777855556 @default.
• W1977361567 hasConcept C41823505 @default.
• W1977361567 hasConcept C43617362 @default.
• W1977361567 hasConcept C501308230 @default.
• W1977361567 hasConcept C506198293 @default.
• W1977361567 hasConcept C544956773 @default.
• W1977361567 hasConcept C69357855 @default.
• W1977361567 hasConcept C8010536 @default.
• W1977361567 hasConcept C97355855 @default.
• W1977361567 hasConceptScore W1977361567C113196181 @default.
• W1977361567 hasConceptScore W1977361567C121332964 @default.
• W1977361567 hasConceptScore W1977361567C145148216 @default.
• W1977361567 hasConceptScore W1977361567C164675345 @default.
• W1977361567 hasConceptScore W1977361567C178790620 @default.
• W1977361567 hasConceptScore W1977361567C185592680 @default.
• W1977361567 hasConceptScore W1977361567C191897082 @default.
• W1977361567 hasConceptScore W1977361567C192562407 @default.
• W1977361567 hasConceptScore W1977361567C200447597 @default.
• W1977361567 hasConceptScore W1977361567C2777855556 @default.
• W1977361567 hasConceptScore W1977361567C41823505 @default.
• W1977361567 hasConceptScore W1977361567C43617362 @default.
• W1977361567 hasConceptScore W1977361567C501308230 @default.
• W1977361567 hasConceptScore W1977361567C506198293 @default.
• W1977361567 hasConceptScore W1977361567C544956773 @default.
• W1977361567 hasConceptScore W1977361567C69357855 @default.
• W1977361567 hasConceptScore W1977361567C8010536 @default.
• W1977361567 hasConceptScore W1977361567C97355855 @default.
• W1977361567 hasIssue "1" @default.
• W1977361567 hasLocation W19773615671 @default.
• W1977361567 hasLocation W19773615672 @default.
• W1977361567 hasLocation W19773615673 @default.
• W1977361567 hasOpenAccess W1977361567 @default.
• W1977361567 hasPrimaryLocation W19773615671 @default.
• W1977361567 hasRelatedWork W1971081315 @default.
• W1977361567 hasRelatedWork W1991085191 @default.
• W1977361567 hasRelatedWork W1997428111 @default.
• W1977361567 hasRelatedWork W1999848689 @default.
• W1977361567 hasRelatedWork W2048269824 @default.
• W1977361567 hasRelatedWork W2065669148 @default.
• W1977361567 hasRelatedWork W2074173678 @default.
• W1977361567 hasRelatedWork W2088081281 @default.
• W1977361567 hasRelatedWork W2136398123 @default.
• W1977361567 hasRelatedWork W2275386326 @default.
• W1977361567 hasVolume "26" @default.
• W1977361567 isParatext "false" @default.

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