Matches in SemOpenAlex for { <https://semopenalex.org/work/W1977405020> ?p ?o ?g. }
Showing items 1 to 84 of
84
with 100 items per page.
- W1977405020 endingPage "031102" @default.
- W1977405020 startingPage "031102" @default.
- W1977405020 abstract "A technique using phase-shifting test mask patterns is introduced for monitoring polarization balance of the illumination in high numerical aperture (NA) and immersion projection printing systems. Test mask patterns are derived from high NA proximity effects and serve to scatter light into high angle spatial frequencies. This creates a central intensity dependent only on the local state of polarization. A test mask consisting of multiple patterns is proposed to monitor the polarization from any arbitrary illumination scheme. Proper calibration of the test reticle enables reasonable mask-making limitations and mask topography effects to be tolerated. A set of linear equations enable determination of the Stokes parameters from a series of resist images. Practical examples are simulated with rigorous electromagnetic theory. In resist, this technique is likely to monitor polarization with a sensitivity of more than 1.5% of the clear field per percent change in polarization state for on-axis illumination, or more than 0.75% for off-axis illumination. The effects of various realistic imaging conditions are discussed." @default.
- W1977405020 created "2016-06-24" @default.
- W1977405020 creator A5013446737 @default.
- W1977405020 creator A5086850276 @default.
- W1977405020 date "2005-07-01" @default.
- W1977405020 modified "2023-09-26" @default.
- W1977405020 title "Phase-shifting mask polarimetry: monitoring polarization at <inline-formula><math display=inline altimg=none overflow=scroll><mrow><mn>193</mn><mtext>-</mtext><mi>nm</mi></mrow></math></inline-formula> high numerical aperture and immersion lithography with phase shifting masks" @default.
- W1977405020 cites W1979861414 @default.
- W1977405020 cites W1980009364 @default.
- W1977405020 cites W2004065689 @default.
- W1977405020 cites W2020575588 @default.
- W1977405020 cites W2023413804 @default.
- W1977405020 cites W2078241886 @default.
- W1977405020 cites W2078593329 @default.
- W1977405020 cites W2116442482 @default.
- W1977405020 doi "https://doi.org/10.1117/1.2038487" @default.
- W1977405020 hasPublicationYear "2005" @default.
- W1977405020 type Work @default.
- W1977405020 sameAs 1977405020 @default.
- W1977405020 citedByCount "6" @default.
- W1977405020 countsByYear W19774050202014 @default.
- W1977405020 countsByYear W19774050202018 @default.
- W1977405020 crossrefType "journal-article" @default.
- W1977405020 hasAuthorship W1977405020A5013446737 @default.
- W1977405020 hasAuthorship W1977405020A5086850276 @default.
- W1977405020 hasConcept C107190969 @default.
- W1977405020 hasConcept C120665830 @default.
- W1977405020 hasConcept C121332964 @default.
- W1977405020 hasConcept C146617872 @default.
- W1977405020 hasConcept C147789679 @default.
- W1977405020 hasConcept C159108749 @default.
- W1977405020 hasConcept C159985019 @default.
- W1977405020 hasConcept C160671074 @default.
- W1977405020 hasConcept C185592680 @default.
- W1977405020 hasConcept C188141570 @default.
- W1977405020 hasConcept C191486275 @default.
- W1977405020 hasConcept C192562407 @default.
- W1977405020 hasConcept C205049153 @default.
- W1977405020 hasConcept C2779227376 @default.
- W1977405020 hasConcept C28493345 @default.
- W1977405020 hasConcept C49040817 @default.
- W1977405020 hasConcept C520434653 @default.
- W1977405020 hasConcept C53524968 @default.
- W1977405020 hasConcept C6260449 @default.
- W1977405020 hasConceptScore W1977405020C107190969 @default.
- W1977405020 hasConceptScore W1977405020C120665830 @default.
- W1977405020 hasConceptScore W1977405020C121332964 @default.
- W1977405020 hasConceptScore W1977405020C146617872 @default.
- W1977405020 hasConceptScore W1977405020C147789679 @default.
- W1977405020 hasConceptScore W1977405020C159108749 @default.
- W1977405020 hasConceptScore W1977405020C159985019 @default.
- W1977405020 hasConceptScore W1977405020C160671074 @default.
- W1977405020 hasConceptScore W1977405020C185592680 @default.
- W1977405020 hasConceptScore W1977405020C188141570 @default.
- W1977405020 hasConceptScore W1977405020C191486275 @default.
- W1977405020 hasConceptScore W1977405020C192562407 @default.
- W1977405020 hasConceptScore W1977405020C205049153 @default.
- W1977405020 hasConceptScore W1977405020C2779227376 @default.
- W1977405020 hasConceptScore W1977405020C28493345 @default.
- W1977405020 hasConceptScore W1977405020C49040817 @default.
- W1977405020 hasConceptScore W1977405020C520434653 @default.
- W1977405020 hasConceptScore W1977405020C53524968 @default.
- W1977405020 hasConceptScore W1977405020C6260449 @default.
- W1977405020 hasIssue "3" @default.
- W1977405020 hasLocation W19774050201 @default.
- W1977405020 hasOpenAccess W1977405020 @default.
- W1977405020 hasPrimaryLocation W19774050201 @default.
- W1977405020 hasRelatedWork W1977405020 @default.
- W1977405020 hasRelatedWork W1991316596 @default.
- W1977405020 hasRelatedWork W2033636524 @default.
- W1977405020 hasRelatedWork W2058183763 @default.
- W1977405020 hasRelatedWork W2081033496 @default.
- W1977405020 hasRelatedWork W2101414336 @default.
- W1977405020 hasRelatedWork W2149463928 @default.
- W1977405020 hasRelatedWork W2345883836 @default.
- W1977405020 hasRelatedWork W2560386814 @default.
- W1977405020 hasRelatedWork W4220928408 @default.
- W1977405020 hasVolume "4" @default.
- W1977405020 isParatext "false" @default.
- W1977405020 isRetracted "false" @default.
- W1977405020 magId "1977405020" @default.
- W1977405020 workType "article" @default.