Matches in SemOpenAlex for { <https://semopenalex.org/work/W1977500847> ?p ?o ?g. }
Showing items 1 to 67 of
67
with 100 items per page.
- W1977500847 endingPage "626" @default.
- W1977500847 startingPage "621" @default.
- W1977500847 abstract "Measurement of carbon concentration in CZ silicon by infrared absorption spectroscopy was examined. Noise level was suppressed down to 10-4 in unit of absorbance. Residual differential absorption between the sample and reference was removed by fitting the phonon absorption spectrum to the background absorption spectrum. The effect of narrowing of absorption spectral range was examined. As a result, it was possible to measure the differential carbon concentration down to about 1×1014/cm3. Measurement of commercial wafer was also established." @default.
- W1977500847 created "2016-06-24" @default.
- W1977500847 creator A5061619484 @default.
- W1977500847 creator A5086772095 @default.
- W1977500847 date "2005-12-01" @default.
- W1977500847 modified "2023-09-23" @default.
- W1977500847 title "Infrared Absorption Measurement of Carbon Concentration down to 1x10<sup>14</sup>/cm<sup>3</sup> in CZ Silicon" @default.
- W1977500847 doi "https://doi.org/10.4028/www.scientific.net/ssp.108-109.621" @default.
- W1977500847 hasPublicationYear "2005" @default.
- W1977500847 type Work @default.
- W1977500847 sameAs 1977500847 @default.
- W1977500847 citedByCount "2" @default.
- W1977500847 crossrefType "journal-article" @default.
- W1977500847 hasAuthorship W1977500847A5061619484 @default.
- W1977500847 hasAuthorship W1977500847A5086772095 @default.
- W1977500847 hasConcept C113196181 @default.
- W1977500847 hasConcept C119824511 @default.
- W1977500847 hasConcept C120665830 @default.
- W1977500847 hasConcept C121332964 @default.
- W1977500847 hasConcept C125287762 @default.
- W1977500847 hasConcept C153642686 @default.
- W1977500847 hasConcept C158355884 @default.
- W1977500847 hasConcept C159985019 @default.
- W1977500847 hasConcept C160671074 @default.
- W1977500847 hasConcept C178790620 @default.
- W1977500847 hasConcept C185592680 @default.
- W1977500847 hasConcept C192562407 @default.
- W1977500847 hasConcept C43617362 @default.
- W1977500847 hasConcept C49040817 @default.
- W1977500847 hasConcept C544956773 @default.
- W1977500847 hasConcept C98015330 @default.
- W1977500847 hasConceptScore W1977500847C113196181 @default.
- W1977500847 hasConceptScore W1977500847C119824511 @default.
- W1977500847 hasConceptScore W1977500847C120665830 @default.
- W1977500847 hasConceptScore W1977500847C121332964 @default.
- W1977500847 hasConceptScore W1977500847C125287762 @default.
- W1977500847 hasConceptScore W1977500847C153642686 @default.
- W1977500847 hasConceptScore W1977500847C158355884 @default.
- W1977500847 hasConceptScore W1977500847C159985019 @default.
- W1977500847 hasConceptScore W1977500847C160671074 @default.
- W1977500847 hasConceptScore W1977500847C178790620 @default.
- W1977500847 hasConceptScore W1977500847C185592680 @default.
- W1977500847 hasConceptScore W1977500847C192562407 @default.
- W1977500847 hasConceptScore W1977500847C43617362 @default.
- W1977500847 hasConceptScore W1977500847C49040817 @default.
- W1977500847 hasConceptScore W1977500847C544956773 @default.
- W1977500847 hasConceptScore W1977500847C98015330 @default.
- W1977500847 hasLocation W19775008471 @default.
- W1977500847 hasOpenAccess W1977500847 @default.
- W1977500847 hasPrimaryLocation W19775008471 @default.
- W1977500847 hasRelatedWork W1979531308 @default.
- W1977500847 hasRelatedWork W1980489227 @default.
- W1977500847 hasRelatedWork W1986227182 @default.
- W1977500847 hasRelatedWork W2032876237 @default.
- W1977500847 hasRelatedWork W2046518989 @default.
- W1977500847 hasRelatedWork W2053401931 @default.
- W1977500847 hasRelatedWork W2056710793 @default.
- W1977500847 hasRelatedWork W2128179620 @default.
- W1977500847 hasRelatedWork W2325826315 @default.
- W1977500847 hasRelatedWork W4285734779 @default.
- W1977500847 hasVolume "108-109" @default.
- W1977500847 isParatext "false" @default.
- W1977500847 isRetracted "false" @default.
- W1977500847 magId "1977500847" @default.
- W1977500847 workType "article" @default.