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- W1977510032 abstract "A technique for producing ultrasmall variable-thickness Josephson microbridges for high-frequency applications is described. A two-dimensional shadowing technique is employed with self-aligning photolithographic and reactive-ion milling processes to pattern the substrate with high-resolution steps. Step heights normal to the substrate are used to determine microbridge dimensions. Lead-alloy microbridges with resistances ≈10 Ω and dimensions of 50 nm have been produced, and their electrical properties studied. The limits on device size are in the range 10–20 nm. Heated-substrate deposition of high-Tc superconductors is compatible with this technique." @default.
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- W1977510032 date "1980-02-01" @default.
- W1977510032 modified "2023-09-26" @default.
- W1977510032 title "Step‐edge fabrication of ultrasmall Josephson microbridges" @default.
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- W1977510032 doi "https://doi.org/10.1063/1.91434" @default.
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