Matches in SemOpenAlex for { <https://semopenalex.org/work/W1977529837> ?p ?o ?g. }
Showing items 1 to 96 of
96
with 100 items per page.
- W1977529837 abstract "An inductively coupled toroidal plasma source is used as an alternative to microwave plasmas for chemical vapor deposition of diamond films. The source, operating at a frequency of 400 kHz, synthesizes diamond films from a mixture of argon, methane, and hydrogen. The toroidal design has been adapted to create a highly efficient environment for diamond film deposition: high gas temperature and a short distance from the sample to the plasma core. Using a toroidal plasma geometry operating in the medium frequency band allows for efficient (≈90%) coupling of AC line power to the plasma and a scalable path to high-power and large-area operation. In test runs, the source generates a high flux of atomic hydrogen over a large area, which is favorable for diamond film growth. Using a deposition temperature of 900–1050 °C and a source to sample distance of 0.1–2.0 cm, diamond films are deposited onto silicon substrates. The results showed that the deposition rate of the diamond films could be controlled using the sample temperature and source to sample spacing. The results also show the films exhibit good-quality polycrystalline diamond as verified by Raman spectroscopy, x-ray diffraction, and scanning electron microscopy. The scanning electron microscopy and x-ray diffraction results show that the samples exhibit diamond (111) and diamond (022) crystallites. The Raman results show that the sp3 peak has a narrow spectral width (FWHM 12 ± 0.5 cm−1) and that negligible amounts of the sp2 band are present, indicating good-quality diamond films." @default.
- W1977529837 created "2016-06-24" @default.
- W1977529837 creator A5010996774 @default.
- W1977529837 creator A5034298691 @default.
- W1977529837 creator A5039034174 @default.
- W1977529837 creator A5039484018 @default.
- W1977529837 creator A5065631655 @default.
- W1977529837 creator A5066198472 @default.
- W1977529837 creator A5067277034 @default.
- W1977529837 creator A5083668252 @default.
- W1977529837 date "2014-08-21" @default.
- W1977529837 modified "2023-10-16" @default.
- W1977529837 title "Toroidal plasma enhanced CVD of diamond films" @default.
- W1977529837 cites W1974118272 @default.
- W1977529837 cites W1992848933 @default.
- W1977529837 cites W2034471293 @default.
- W1977529837 cites W2043554095 @default.
- W1977529837 cites W2062234562 @default.
- W1977529837 cites W2099704960 @default.
- W1977529837 cites W2123014578 @default.
- W1977529837 cites W2125827949 @default.
- W1977529837 cites W3100806243 @default.
- W1977529837 doi "https://doi.org/10.1116/1.4893416" @default.
- W1977529837 hasPublicationYear "2014" @default.
- W1977529837 type Work @default.
- W1977529837 sameAs 1977529837 @default.
- W1977529837 citedByCount "1" @default.
- W1977529837 countsByYear W19775298372020 @default.
- W1977529837 crossrefType "journal-article" @default.
- W1977529837 hasAuthorship W1977529837A5010996774 @default.
- W1977529837 hasAuthorship W1977529837A5034298691 @default.
- W1977529837 hasAuthorship W1977529837A5039034174 @default.
- W1977529837 hasAuthorship W1977529837A5039484018 @default.
- W1977529837 hasAuthorship W1977529837A5065631655 @default.
- W1977529837 hasAuthorship W1977529837A5066198472 @default.
- W1977529837 hasAuthorship W1977529837A5067277034 @default.
- W1977529837 hasAuthorship W1977529837A5083668252 @default.
- W1977529837 hasConcept C113196181 @default.
- W1977529837 hasConcept C120665830 @default.
- W1977529837 hasConcept C121332964 @default.
- W1977529837 hasConcept C159985019 @default.
- W1977529837 hasConcept C162882748 @default.
- W1977529837 hasConcept C171250308 @default.
- W1977529837 hasConcept C185592680 @default.
- W1977529837 hasConcept C19067145 @default.
- W1977529837 hasConcept C192562407 @default.
- W1977529837 hasConcept C26771246 @default.
- W1977529837 hasConcept C2776921476 @default.
- W1977529837 hasConcept C38347018 @default.
- W1977529837 hasConcept C40003534 @default.
- W1977529837 hasConcept C43617362 @default.
- W1977529837 hasConcept C49040817 @default.
- W1977529837 hasConcept C544956773 @default.
- W1977529837 hasConcept C57410435 @default.
- W1977529837 hasConcept C62520636 @default.
- W1977529837 hasConcept C82706917 @default.
- W1977529837 hasConcept C95974651 @default.
- W1977529837 hasConceptScore W1977529837C113196181 @default.
- W1977529837 hasConceptScore W1977529837C120665830 @default.
- W1977529837 hasConceptScore W1977529837C121332964 @default.
- W1977529837 hasConceptScore W1977529837C159985019 @default.
- W1977529837 hasConceptScore W1977529837C162882748 @default.
- W1977529837 hasConceptScore W1977529837C171250308 @default.
- W1977529837 hasConceptScore W1977529837C185592680 @default.
- W1977529837 hasConceptScore W1977529837C19067145 @default.
- W1977529837 hasConceptScore W1977529837C192562407 @default.
- W1977529837 hasConceptScore W1977529837C26771246 @default.
- W1977529837 hasConceptScore W1977529837C2776921476 @default.
- W1977529837 hasConceptScore W1977529837C38347018 @default.
- W1977529837 hasConceptScore W1977529837C40003534 @default.
- W1977529837 hasConceptScore W1977529837C43617362 @default.
- W1977529837 hasConceptScore W1977529837C49040817 @default.
- W1977529837 hasConceptScore W1977529837C544956773 @default.
- W1977529837 hasConceptScore W1977529837C57410435 @default.
- W1977529837 hasConceptScore W1977529837C62520636 @default.
- W1977529837 hasConceptScore W1977529837C82706917 @default.
- W1977529837 hasConceptScore W1977529837C95974651 @default.
- W1977529837 hasIssue "5" @default.
- W1977529837 hasLocation W19775298371 @default.
- W1977529837 hasOpenAccess W1977529837 @default.
- W1977529837 hasPrimaryLocation W19775298371 @default.
- W1977529837 hasRelatedWork W1571640687 @default.
- W1977529837 hasRelatedWork W1587216933 @default.
- W1977529837 hasRelatedWork W2024697245 @default.
- W1977529837 hasRelatedWork W2042618982 @default.
- W1977529837 hasRelatedWork W2057243639 @default.
- W1977529837 hasRelatedWork W2067894028 @default.
- W1977529837 hasRelatedWork W2087328166 @default.
- W1977529837 hasRelatedWork W2164026909 @default.
- W1977529837 hasRelatedWork W2387075683 @default.
- W1977529837 hasRelatedWork W2545712032 @default.
- W1977529837 hasVolume "32" @default.
- W1977529837 isParatext "false" @default.
- W1977529837 isRetracted "false" @default.
- W1977529837 magId "1977529837" @default.
- W1977529837 workType "article" @default.