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- W1977599889 abstract "A new supercritical carbon dioxide (scCO2) developable, chemically amplified positive-tone photoresist is introduced by silylation of poly(tetrahydropyranyl methacrylate-co-1H,1H-dihydroperfluorooctyl methacrylate) block and random copolymers following lithographic patterning by 248-nm irradiation. High-resolution submicrometer features are possible with scCO2 as the developing solvent." @default.
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- W1977599889 date "2003-12-01" @default.
- W1977599889 modified "2023-09-27" @default.
- W1977599889 title "Positive-Tone Photoresist Process for Supercritical Carbon Dioxide Development" @default.
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- W1977599889 doi "https://doi.org/10.1021/cm034343i" @default.
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