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- W1977614923 startingPage "1564" @default.
- W1977614923 abstract "Optical absorption measurements of sputtered titanium (Ti) ions were performed during rf magnetron sputtering. A wavelength of 336.12 nm (z4G9/2°→a4F7/2) was used as the absorption line based on assignments of emission spectra for Ti ion (Ti II). We present variations of line-integrated absorption in terms of optical thickness against applied rf power for Ar sputtering at a pressure of 3.5 Pa. Ratios of absorption of Ti II to that of Ti atoms (Ti I), which are representative of the ionization degree of sputtered Ti atoms, are also shown." @default.
- W1977614923 created "2016-06-24" @default.
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- W1977614923 date "2002-03-15" @default.
- W1977614923 modified "2023-09-26" @default.
- W1977614923 title "Optical Absorption Measurements of Sputtered Titanium Ions in RF Magnetron Sputtering" @default.
- W1977614923 cites W1741404311 @default.
- W1977614923 cites W2082117541 @default.
- W1977614923 doi "https://doi.org/10.1143/jjap.41.1564" @default.
- W1977614923 hasPublicationYear "2002" @default.
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