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- W1977615293 endingPage "1349" @default.
- W1977615293 startingPage "1344" @default.
- W1977615293 abstract "Etching characteristics of a porous silica material (ISM-1.5™ produced in ULVAC, Inc.) were investigated and compared with those of thermal oxide. The etch rate of porous silica in magnetic neutral loop discharge plasma was approximately two times higher than that of thermal SiO2 film when linear saturated perfluorocarbon compounds were used. This may be due to the low film density of the porous silica. However, in the case of C4F8 (octafluorocyclobutane) plasma, the etch rate ratio to SiO2 was about 1.45. When C4F6 (CF2=CFCF=CF2: hexafluorobutadiene) was used, the etch rate ratio was also very low (0.6). So, the etch rate strongly depended on the gas structure, whereas the SiO2 etch rate did not depend on the gas species and was almost constant. Through mass spectrometry and x-ray photoelectron spectroscopy measurements, it was deduced that the fluorocarbon polymer formed in the pore suppressed the etch rate of porous silica in C4F8 or C4F6 plasmas." @default.
- W1977615293 created "2016-06-24" @default.
- W1977615293 creator A5010916565 @default.
- W1977615293 creator A5017541508 @default.
- W1977615293 creator A5022412611 @default.
- W1977615293 creator A5022632206 @default.
- W1977615293 creator A5038477097 @default.
- W1977615293 creator A5057040519 @default.
- W1977615293 date "2003-06-20" @default.
- W1977615293 modified "2023-09-26" @default.
- W1977615293 title "Etching characteristics of porous silica (k=1.9) in neutral loop discharge plasma" @default.
- W1977615293 cites W1969608150 @default.
- W1977615293 cites W1984435261 @default.
- W1977615293 cites W1984575543 @default.
- W1977615293 cites W2004606690 @default.
- W1977615293 cites W2032218118 @default.
- W1977615293 cites W2044368146 @default.
- W1977615293 cites W2081096414 @default.
- W1977615293 cites W2093000238 @default.
- W1977615293 cites W2952069626 @default.
- W1977615293 doi "https://doi.org/10.1116/1.1587137" @default.
- W1977615293 hasPublicationYear "2003" @default.
- W1977615293 type Work @default.
- W1977615293 sameAs 1977615293 @default.
- W1977615293 citedByCount "11" @default.
- W1977615293 countsByYear W19776152932019 @default.
- W1977615293 crossrefType "journal-article" @default.
- W1977615293 hasAuthorship W1977615293A5010916565 @default.
- W1977615293 hasAuthorship W1977615293A5017541508 @default.
- W1977615293 hasAuthorship W1977615293A5022412611 @default.
- W1977615293 hasAuthorship W1977615293A5022632206 @default.
- W1977615293 hasAuthorship W1977615293A5038477097 @default.
- W1977615293 hasAuthorship W1977615293A5057040519 @default.
- W1977615293 hasConcept C100460472 @default.
- W1977615293 hasConcept C113196181 @default.
- W1977615293 hasConcept C121332964 @default.
- W1977615293 hasConcept C127413603 @default.
- W1977615293 hasConcept C159985019 @default.
- W1977615293 hasConcept C175708663 @default.
- W1977615293 hasConcept C185592680 @default.
- W1977615293 hasConcept C191897082 @default.
- W1977615293 hasConcept C192562407 @default.
- W1977615293 hasConcept C2779227376 @default.
- W1977615293 hasConcept C2779851234 @default.
- W1977615293 hasConcept C42360764 @default.
- W1977615293 hasConcept C43617362 @default.
- W1977615293 hasConcept C62520636 @default.
- W1977615293 hasConcept C6648577 @default.
- W1977615293 hasConcept C82706917 @default.
- W1977615293 hasConceptScore W1977615293C100460472 @default.
- W1977615293 hasConceptScore W1977615293C113196181 @default.
- W1977615293 hasConceptScore W1977615293C121332964 @default.
- W1977615293 hasConceptScore W1977615293C127413603 @default.
- W1977615293 hasConceptScore W1977615293C159985019 @default.
- W1977615293 hasConceptScore W1977615293C175708663 @default.
- W1977615293 hasConceptScore W1977615293C185592680 @default.
- W1977615293 hasConceptScore W1977615293C191897082 @default.
- W1977615293 hasConceptScore W1977615293C192562407 @default.
- W1977615293 hasConceptScore W1977615293C2779227376 @default.
- W1977615293 hasConceptScore W1977615293C2779851234 @default.
- W1977615293 hasConceptScore W1977615293C42360764 @default.
- W1977615293 hasConceptScore W1977615293C43617362 @default.
- W1977615293 hasConceptScore W1977615293C62520636 @default.
- W1977615293 hasConceptScore W1977615293C6648577 @default.
- W1977615293 hasConceptScore W1977615293C82706917 @default.
- W1977615293 hasIssue "4" @default.
- W1977615293 hasLocation W19776152931 @default.
- W1977615293 hasOpenAccess W1977615293 @default.
- W1977615293 hasPrimaryLocation W19776152931 @default.
- W1977615293 hasRelatedWork W1660000098 @default.
- W1977615293 hasRelatedWork W1990208142 @default.
- W1977615293 hasRelatedWork W1994953063 @default.
- W1977615293 hasRelatedWork W2024422983 @default.
- W1977615293 hasRelatedWork W2160957986 @default.
- W1977615293 hasRelatedWork W2321245214 @default.
- W1977615293 hasRelatedWork W2899084033 @default.
- W1977615293 hasRelatedWork W2973974236 @default.
- W1977615293 hasRelatedWork W3028054937 @default.
- W1977615293 hasRelatedWork W792636976 @default.
- W1977615293 hasVolume "21" @default.
- W1977615293 isParatext "false" @default.
- W1977615293 isRetracted "false" @default.
- W1977615293 magId "1977615293" @default.
- W1977615293 workType "article" @default.