Matches in SemOpenAlex for { <https://semopenalex.org/work/W1977684457> ?p ?o ?g. }
- W1977684457 endingPage "7032" @default.
- W1977684457 startingPage "7021" @default.
- W1977684457 abstract "We present and analyze a method to improve the morphology and mechanical properties of gold thin films for use in optical sensors or other settings where good adhesion of gold to a substrate is of importance and where controlled topography/roughness is key. To improve the adhesion of thermally evaporated gold thin films, we introduce a gold deposition step on SU-8 photoresist prior to UV exposure but after the pre-bake step of SU-8 processing. Shrinkage and distribution of residual stresses, which occur during cross-linking of the SU-8 polymer layer in the post-exposure baking step, are responsible for the higher adhesion of the top gold film to the post-deposition cured SU-8 sublayer. The SU-8 underlayer can also be used to tune the resulting gold film morphology. Our promoter-free protocol is easily integrated with existing sensor microfabrication processes." @default.
- W1977684457 created "2016-06-24" @default.
- W1977684457 creator A5043133733 @default.
- W1977684457 creator A5045528114 @default.
- W1977684457 creator A5088296396 @default.
- W1977684457 date "2013-05-28" @default.
- W1977684457 modified "2023-10-01" @default.
- W1977684457 title "Improved Adhesion of Gold Thin Films Evaporated on Polymer Resin: Applications for Sensing Surfaces and MEMS" @default.
- W1977684457 cites W1967063163 @default.
- W1977684457 cites W1968369580 @default.
- W1977684457 cites W1969098957 @default.
- W1977684457 cites W1972065167 @default.
- W1977684457 cites W1987053585 @default.
- W1977684457 cites W1993139532 @default.
- W1977684457 cites W2010227280 @default.
- W1977684457 cites W2011187736 @default.
- W1977684457 cites W2049704035 @default.
- W1977684457 cites W2055921510 @default.
- W1977684457 cites W2059202392 @default.
- W1977684457 cites W2079365723 @default.
- W1977684457 cites W2085951355 @default.
- W1977684457 cites W2088375222 @default.
- W1977684457 cites W2093236932 @default.
- W1977684457 cites W2093670858 @default.
- W1977684457 cites W2108973751 @default.
- W1977684457 cites W2115022441 @default.
- W1977684457 cites W2116795169 @default.
- W1977684457 cites W2124187419 @default.
- W1977684457 cites W2125734667 @default.
- W1977684457 cites W2131473658 @default.
- W1977684457 cites W2153175661 @default.
- W1977684457 cites W2314136388 @default.
- W1977684457 cites W2316614961 @default.
- W1977684457 cites W2334878419 @default.
- W1977684457 doi "https://doi.org/10.3390/s130607021" @default.
- W1977684457 hasPubMedCentralId "https://www.ncbi.nlm.nih.gov/pmc/articles/3715244" @default.
- W1977684457 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/23760086" @default.
- W1977684457 hasPublicationYear "2013" @default.
- W1977684457 type Work @default.
- W1977684457 sameAs 1977684457 @default.
- W1977684457 citedByCount "36" @default.
- W1977684457 countsByYear W19776844572014 @default.
- W1977684457 countsByYear W19776844572015 @default.
- W1977684457 countsByYear W19776844572016 @default.
- W1977684457 countsByYear W19776844572017 @default.
- W1977684457 countsByYear W19776844572018 @default.
- W1977684457 countsByYear W19776844572019 @default.
- W1977684457 countsByYear W19776844572020 @default.
- W1977684457 countsByYear W19776844572021 @default.
- W1977684457 countsByYear W19776844572022 @default.
- W1977684457 countsByYear W19776844572023 @default.
- W1977684457 crossrefType "journal-article" @default.
- W1977684457 hasAuthorship W1977684457A5043133733 @default.
- W1977684457 hasAuthorship W1977684457A5045528114 @default.
- W1977684457 hasAuthorship W1977684457A5088296396 @default.
- W1977684457 hasBestOaLocation W19776844571 @default.
- W1977684457 hasConcept C111368507 @default.
- W1977684457 hasConcept C127313418 @default.
- W1977684457 hasConcept C134406635 @default.
- W1977684457 hasConcept C136525101 @default.
- W1977684457 hasConcept C142724271 @default.
- W1977684457 hasConcept C151730666 @default.
- W1977684457 hasConcept C159985019 @default.
- W1977684457 hasConcept C171250308 @default.
- W1977684457 hasConcept C180145272 @default.
- W1977684457 hasConcept C19067145 @default.
- W1977684457 hasConcept C192562407 @default.
- W1977684457 hasConcept C204787440 @default.
- W1977684457 hasConcept C2777289219 @default.
- W1977684457 hasConcept C2779227376 @default.
- W1977684457 hasConcept C2781155771 @default.
- W1977684457 hasConcept C2816523 @default.
- W1977684457 hasConcept C37977207 @default.
- W1977684457 hasConcept C521977710 @default.
- W1977684457 hasConcept C527607 @default.
- W1977684457 hasConcept C64297162 @default.
- W1977684457 hasConcept C68928338 @default.
- W1977684457 hasConcept C71039073 @default.
- W1977684457 hasConcept C71924100 @default.
- W1977684457 hasConcept C84416704 @default.
- W1977684457 hasConcept C86803240 @default.
- W1977684457 hasConceptScore W1977684457C111368507 @default.
- W1977684457 hasConceptScore W1977684457C127313418 @default.
- W1977684457 hasConceptScore W1977684457C134406635 @default.
- W1977684457 hasConceptScore W1977684457C136525101 @default.
- W1977684457 hasConceptScore W1977684457C142724271 @default.
- W1977684457 hasConceptScore W1977684457C151730666 @default.
- W1977684457 hasConceptScore W1977684457C159985019 @default.
- W1977684457 hasConceptScore W1977684457C171250308 @default.
- W1977684457 hasConceptScore W1977684457C180145272 @default.
- W1977684457 hasConceptScore W1977684457C19067145 @default.
- W1977684457 hasConceptScore W1977684457C192562407 @default.
- W1977684457 hasConceptScore W1977684457C204787440 @default.
- W1977684457 hasConceptScore W1977684457C2777289219 @default.
- W1977684457 hasConceptScore W1977684457C2779227376 @default.
- W1977684457 hasConceptScore W1977684457C2781155771 @default.
- W1977684457 hasConceptScore W1977684457C2816523 @default.
- W1977684457 hasConceptScore W1977684457C37977207 @default.