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- W1977762925 abstract "Defectivity in spin-coated, but unpatterned ultrathin resist (UTR) films ( = 3500 Angstrom) processed under similar condition as the ultra-thin resists. The results show that for a well-optimized coating process and within the thickness range explored (800 - 4200 Angstrom), there is no discernible dependence of defectivity on film thickness of the particular resists studied and on spin speed. Also assessed is the capability of the current metrology toolset for inspecting, reviewing, and classifying the various types of defects in UTR films." @default.
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- W1977762925 date "2000-06-02" @default.
- W1977762925 modified "2023-09-26" @default.
- W1977762925 title "<title>Defects and metrology of ultrathin resist films</title>" @default.
- W1977762925 doi "https://doi.org/10.1117/12.386506" @default.
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