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- W1977924873 abstract "We have designed and developed an aqueous base soluble polymer system with a silsequioxane (SSQ) backbone for 157nm bilayer resist applications. These base resins have absorbances as low as 0.6micrometers <SUP>-1</SUP> at 157nm. The imagable polymers which contain acid-labile ester functionalities have absorbances between 2.0 and 3.0micrometers <SUP>-1</SUP>. The silicon content of these polymers is around 15% by weight. Therefore, our polymers can be utilized in 157nm positive bilayer resist applications with a film thickness of around 150nm. We have evaluated several resist formulations based on these polymers. These resist formulations have shown high contrast and excellent resolution." @default.
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- W1977924873 date "2001-08-24" @default.
- W1977924873 modified "2023-09-23" @default.
- W1977924873 title "Silicon-containing resists for 157-nm applications" @default.
- W1977924873 doi "https://doi.org/10.1117/12.436861" @default.
- W1977924873 hasPublicationYear "2001" @default.
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