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- W1978001824 endingPage "1066" @default.
- W1978001824 startingPage "1058" @default.
- W1978001824 abstract "The plasma characteristics of a triode low-voltage sputtering (LVS) system have been measured. The current–voltage relationships in the confined plasma discharge, of the target and of the substrate table, have been investigated as a function of pressure for Ar and Xe, with and without an axial magnetic field. The power dissipation and steady-state temperature at the target and substrate table were also measured as a function of operating conditions. From these measurements the plasma potential and target current densities could be deduced. The application of these results to sputter deposition is considered." @default.
- W1978001824 created "2016-06-24" @default.
- W1978001824 creator A5000581366 @default.
- W1978001824 creator A5001689276 @default.
- W1978001824 date "1975-09-01" @default.
- W1978001824 modified "2023-09-25" @default.
- W1978001824 title "Low‐voltage triode sputtering with a confined plasma. Part II: Plasma characteristics and energy transport" @default.
- W1978001824 doi "https://doi.org/10.1116/1.568462" @default.
- W1978001824 hasPublicationYear "1975" @default.
- W1978001824 type Work @default.
- W1978001824 sameAs 1978001824 @default.
- W1978001824 citedByCount "21" @default.
- W1978001824 countsByYear W19780018242012 @default.
- W1978001824 countsByYear W19780018242018 @default.
- W1978001824 crossrefType "journal-article" @default.
- W1978001824 hasAuthorship W1978001824A5000581366 @default.
- W1978001824 hasAuthorship W1978001824A5001689276 @default.
- W1978001824 hasConcept C111368507 @default.
- W1978001824 hasConcept C121332964 @default.
- W1978001824 hasConcept C123544296 @default.
- W1978001824 hasConcept C127313418 @default.
- W1978001824 hasConcept C135402231 @default.
- W1978001824 hasConcept C165801399 @default.
- W1978001824 hasConcept C171250308 @default.
- W1978001824 hasConcept C184779094 @default.
- W1978001824 hasConcept C185592680 @default.
- W1978001824 hasConcept C19067145 @default.
- W1978001824 hasConcept C192562407 @default.
- W1978001824 hasConcept C22423302 @default.
- W1978001824 hasConcept C2777289219 @default.
- W1978001824 hasConcept C52192207 @default.
- W1978001824 hasConcept C60581705 @default.
- W1978001824 hasConcept C61427134 @default.
- W1978001824 hasConcept C62520636 @default.
- W1978001824 hasConcept C82706917 @default.
- W1978001824 hasConcept C97355855 @default.
- W1978001824 hasConceptScore W1978001824C111368507 @default.
- W1978001824 hasConceptScore W1978001824C121332964 @default.
- W1978001824 hasConceptScore W1978001824C123544296 @default.
- W1978001824 hasConceptScore W1978001824C127313418 @default.
- W1978001824 hasConceptScore W1978001824C135402231 @default.
- W1978001824 hasConceptScore W1978001824C165801399 @default.
- W1978001824 hasConceptScore W1978001824C171250308 @default.
- W1978001824 hasConceptScore W1978001824C184779094 @default.
- W1978001824 hasConceptScore W1978001824C185592680 @default.
- W1978001824 hasConceptScore W1978001824C19067145 @default.
- W1978001824 hasConceptScore W1978001824C192562407 @default.
- W1978001824 hasConceptScore W1978001824C22423302 @default.
- W1978001824 hasConceptScore W1978001824C2777289219 @default.
- W1978001824 hasConceptScore W1978001824C52192207 @default.
- W1978001824 hasConceptScore W1978001824C60581705 @default.
- W1978001824 hasConceptScore W1978001824C61427134 @default.
- W1978001824 hasConceptScore W1978001824C62520636 @default.
- W1978001824 hasConceptScore W1978001824C82706917 @default.
- W1978001824 hasConceptScore W1978001824C97355855 @default.
- W1978001824 hasIssue "5" @default.
- W1978001824 hasLocation W19780018241 @default.
- W1978001824 hasOpenAccess W1978001824 @default.
- W1978001824 hasPrimaryLocation W19780018241 @default.
- W1978001824 hasRelatedWork W192053364 @default.
- W1978001824 hasRelatedWork W1978001824 @default.
- W1978001824 hasRelatedWork W2086744665 @default.
- W1978001824 hasRelatedWork W2088537478 @default.
- W1978001824 hasRelatedWork W2094575347 @default.
- W1978001824 hasRelatedWork W2108805245 @default.
- W1978001824 hasRelatedWork W2370913926 @default.
- W1978001824 hasRelatedWork W2381361065 @default.
- W1978001824 hasRelatedWork W2389286191 @default.
- W1978001824 hasRelatedWork W4385775710 @default.
- W1978001824 hasVolume "12" @default.
- W1978001824 isParatext "false" @default.
- W1978001824 isRetracted "false" @default.
- W1978001824 magId "1978001824" @default.
- W1978001824 workType "article" @default.